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Micromachines
Volume 11
Issue 3
10.3390/mi11030252
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Article

An In-Line Fiber Optic Fabry–Perot Sensor for High-Temperature Vibration Measurement

by
Dong Chen
,
Jiang Qian
,
Jia Liu
,
Baojie Chen
,
Guowen An
,
Yingping Hong
,
Pinggang Jia
* and
Jijun Xiong
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(3), 252; https://doi.org/10.3390/mi11030252
Submission received: 10 February 2020 / Revised: 24 February 2020 / Accepted: 24 February 2020 / Published: 1 March 2020
(This article belongs to the Special Issue MOEMS: Micro-Optical MEMS)
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Abstract

An in-line fiber optic Fabry–Perot (FP) sensor for high-temperature vibration measurement is proposed and experimentally demonstrated in this paper. We constructed an FP cavity and a mass on single-mode fibers (SMFs) by fusion, and together they were inserted into a hollow silica glass tube (HST) to form a vibration sensor. The radial dimension of the sensor was less than 500 μm. With its all-silica structure, the sensor has the prospect of measuring vibration in high-temperature environments. In our test, the sensor had a resonance frequency of 165 Hz. The voltage sensitivity of the sensor system was about 11.57 mV/g and the nonlinearity was about 2.06%. The sensor could work normally when the temperature was below 500 °C, and the drift of the phase offset point with temperature was 0.84 pm/°C.
Keywords: fiber optic sensor; Fabry–Perot; high temperature; vibration measurement fiber optic sensor; Fabry–Perot; high temperature; vibration measurement

Share and Cite

MDPI and ACS Style

Chen, D.; Qian, J.; Liu, J.; Chen, B.; An, G.; Hong, Y.; Jia, P.; Xiong, J. An In-Line Fiber Optic Fabry–Perot Sensor for High-Temperature Vibration Measurement. Micromachines 2020, 11, 252. https://doi.org/10.3390/mi11030252

AMA Style

Chen D, Qian J, Liu J, Chen B, An G, Hong Y, Jia P, Xiong J. An In-Line Fiber Optic Fabry–Perot Sensor for High-Temperature Vibration Measurement. Micromachines. 2020; 11(3):252. https://doi.org/10.3390/mi11030252

Chicago/Turabian Style

Chen, Dong, Jiang Qian, Jia Liu, Baojie Chen, Guowen An, Yingping Hong, Pinggang Jia, and Jijun Xiong. 2020. "An In-Line Fiber Optic Fabry–Perot Sensor for High-Temperature Vibration Measurement" Micromachines 11, no. 3: 252. https://doi.org/10.3390/mi11030252

APA Style

Chen, D., Qian, J., Liu, J., Chen, B., An, G., Hong, Y., Jia, P., & Xiong, J. (2020). An In-Line Fiber Optic Fabry–Perot Sensor for High-Temperature Vibration Measurement. Micromachines, 11(3), 252. https://doi.org/10.3390/mi11030252

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