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Journal: Micromachines, 2020
Volume: 11
Number: 267

Article: An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications
Authors: by Chikako Sano, Manabu Ataka, Gen Hashiguchi and Hiroshi Toshiyoshi
Link: https://www.mdpi.com/2072-666X/11/3/267

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