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Journal: Micromachines, 2020
Volume: 11
Number: 327
Article:
One-Step Femtosecond Laser Stealth Dicing of Quartz
Authors:
by
Caterina Gaudiuso, Annalisa Volpe and Antonio Ancona
Link:
https://www.mdpi.com/2072-666X/11/3/327
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