Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy
Abstract
:1. Introduction
2. Materials and Methods
2.1. Design Considerations
2.2. Proposed Micro-Fabricated Gas Cells
2.3. Fabrication Steps
2.4. Experimental Setup
3. Results
3.1. Modeling and Simulation
- and are integers.
- is relatively prime (co-prime).
3.2. Experimental Validation
4. Discussion
5. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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0.01 | 0.03 | 0.05 | 0.07 | 0.09 | ||
---|---|---|---|---|---|---|
0.91 | (5, 11, 19.8) | (5, 11, 19.8) | (4, 9, 15.8) | (3, 7, 11.7) | (3, 7, 11.7) | |
0.93 | (6, 13, 23.8) | (5, 11, 19.8) | (4, 9, 15.8) | (3, 8, 12.9) | (3, 7, 11.7) | |
0.95 | (9, 19, 35.9) | (5, 12, 21.3) | (4, 9, 15.8) | (3, 8, 12.9) | (3, 7, 11.7) | |
0.97 | (10, 21, 39.9) | (5, 12, 21.3) | (4, 9, 15.8) | (3, 8, 12.9) | (3, 7, 11.7) | |
0.99 | (10, 21, 39.9) | (5, 12, 21.3) | (4, 9, 15.8) | (3, 8, 12.9) | (3, 7, 11.7) |
Parameter | Value |
---|---|
Metallization material | Gold |
Cell radius | 3 |
Cell () | 22, 9 |
Depth | 0.19 |
Input mirror (,) | 8.8, 1.2 |
Output mirror () | 6.7, 1.4 |
Cell mirrors () | 5.3, 0.9 |
Cell area | 7 × 8 |
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Fathy, A.; Sabry, Y.M.; Gnambodoe-Capochichi, M.; Marty, F.; Khalil, D.; Bourouina, T. Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy. Micromachines 2020, 11, 463. https://doi.org/10.3390/mi11050463
Fathy A, Sabry YM, Gnambodoe-Capochichi M, Marty F, Khalil D, Bourouina T. Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy. Micromachines. 2020; 11(5):463. https://doi.org/10.3390/mi11050463
Chicago/Turabian StyleFathy, Alaa, Yasser M. Sabry, Martine Gnambodoe-Capochichi, Frederic Marty, Diaa Khalil, and Tarik Bourouina. 2020. "Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy" Micromachines 11, no. 5: 463. https://doi.org/10.3390/mi11050463