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Journal: Micromachines, 2020
Volume: 11
Number: 741
Article:
Single-Grain Gate-All-Around Si Nanowire FET Using Low-Thermal-Budget Processes for Monolithic Three-Dimensional Integrated Circuits
Authors:
by
Tung-Ying Hsieh, Ping-Yi Hsieh, Chih-Chao Yang, Chang-Hong Shen, Jia-Min Shieh, Wen-Kuan Yeh and Meng-Chyi Wu
Link:
https://www.mdpi.com/2072-666X/11/8/741
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