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Journal: Micromachines, 2021
Volume: 12
Number: 1382

Article: Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave
Authors: by Myeongjun Kim, Philgong Choi, Jae Heung Jo and Kyunghan Kim
Link: https://www.mdpi.com/2072-666X/12/11/1382

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