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Journal: Micromachines, 2022
Volume: 13
Number: 129

Article: Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature
Authors: by Yang Yue, Maosong Sun, Jie Chen, Xuejun Yan, Zhuokun He, Jicai Zhang and Wenhong Sun
Link: https://www.mdpi.com/2072-666X/13/1/129

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