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Journal: Micromachines, 2022
Volume: 13
Number: 40
Article:
An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors
Authors:
by
Hongrui Lv, Yinglong Huang, Yujie Ai, Zhe Liu, Defeng Lin, Zhe Cheng, Lifang Jia, Bingliang Guo, Boyu Dong and Yun Zhang
Link:
https://www.mdpi.com/2072-666X/13/1/40
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