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Journal: Micromachines, 2022
Volume: 13
Number: 951

Article: Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement
Authors: by Yonggang Liu, Shuliang Zhang, Pengfei Yan and Hiji Li
Link: https://www.mdpi.com/2072-666X/13/6/951

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