Article Versions Notes

Zang J, Fan Z, Li P, Duan X, Wu C, Cui D, Xue C. Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film. Micromachines. 2022; 13(8):1317. https://doi.org/10.3390/mi13081317

Zang, Junbin, Zheng Fan, Penglu Li, Xiaoya Duan, Chunsheng Wu, Danfeng Cui, and Chenyang Xue. 2022. "Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film" Micromachines 13, no. 8: 1317. https://doi.org/10.3390/mi13081317

Zang, J., Fan, Z., Li, P., Duan, X., Wu, C., Cui, D., & Xue, C. (2022). Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film. Micromachines, 13(8), 1317. https://doi.org/10.3390/mi13081317