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Journal: Micromachines, 2022
Volume: 13
Number: 1317
1317
Article: Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film
Authors: by Junbin Zang, Zheng Fan, Penglu Li, Xiaoya Duan, Chunsheng Wu, Danfeng Cui and Chenyang Xue
Link: https://www.mdpi.com/2072-666X/13/8/1317

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