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Journal: Micromachines, 2023
Volume: 14
Number: 2034

Article: Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors
Authors: by Seokwon Joo, Jung Yeon Han, Soonmin Seo and Ju-Hyung Kim
Link: https://www.mdpi.com/2072-666X/14/11/2034

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