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Journal: Micromachines, 2023
Volume: 14
Number: 2220

Article: An Improved 3D OPC Method for the Fabrication of High-Fidelity Micro Fresnel Lenses
Authors: by Fei Peng, Chao Sun, Hui Wan and Chengqun Gui
Link: https://www.mdpi.com/2072-666X/14/12/2220

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