Li, W.; Zha, F.; Fu, B.; Li, Y.; Duan, J.; Zhou, Z.
A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes. Micromachines 2024, 15, 145.
https://doi.org/10.3390/mi15010145
AMA Style
Li W, Zha F, Fu B, Li Y, Duan J, Zhou Z.
A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes. Micromachines. 2024; 15(1):145.
https://doi.org/10.3390/mi15010145
Chicago/Turabian Style
Li, Wei, Fangyuan Zha, Bo Fu, Yanglong Li, Jiazhu Duan, and Ziyou Zhou.
2024. "A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes" Micromachines 15, no. 1: 145.
https://doi.org/10.3390/mi15010145
APA Style
Li, W., Zha, F., Fu, B., Li, Y., Duan, J., & Zhou, Z.
(2024). A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes. Micromachines, 15(1), 145.
https://doi.org/10.3390/mi15010145