An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. Cross-Talk of the Initial Actuator Design
3.2. Design Variations and Their Cross-Talk
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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Parameter | Value | |
pixel count | 4000 × 2400 | |
pixel size | 4 µm × 6 µm | |
frame rate | >1 kHz | |
vertical deflection range | 0 … 350 nm | |
deflection precision | 8-bit | |
mirror tilt | <0.1° | |
pixel addressing voltage | 0 … 3.3 V | |
power dissipation | <2.5 W |
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Neudert, A.; Duerr, P.; Nitzsche, M. An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array. Micromachines 2024, 15, 942. https://doi.org/10.3390/mi15080942
Neudert A, Duerr P, Nitzsche M. An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array. Micromachines. 2024; 15(8):942. https://doi.org/10.3390/mi15080942
Chicago/Turabian StyleNeudert, Andreas, Peter Duerr, and Mario Nitzsche. 2024. "An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array" Micromachines 15, no. 8: 942. https://doi.org/10.3390/mi15080942