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Open AccessArticle
Acoustic Transmission Measurements for Extracting the Mechanical Properties of Complex 3D MEMS Transducers
by
Dennis Becker
Dennis Becker 1,*
,
Moritz Littwin
Moritz Littwin 1,
Achim Bittner
Achim Bittner 1,* and
Alfons Dehé
Alfons Dehé 1,2
1
Hahn-Schickard, Wilhelm-Schickard Straße 10, 78052 Villingen-Schwenningen, Germany
2
Georg H. Endress Chair of Smart Systems Integration, Department of Microsystems Engineering—IMEK, Albert-Ludwigs-Universität Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany
*
Authors to whom correspondence should be addressed.
Micromachines 2024, 15(9), 1070; https://doi.org/10.3390/mi15091070 (registering DOI)
Submission received: 26 July 2024
/
Revised: 22 August 2024
/
Accepted: 23 August 2024
/
Published: 24 August 2024
Abstract
Recent publications on acoustic MEMS transducers present a new three-dimensional folded diaphragm that utilizes buried in-plane vibrating structures to increase the active area from a small chip volume. Characterization of the mechanical properties plays a key role in the development of new MEMS transducers, whereby established measurement methods are usually tailored to structures close to the sample surface. In order to access the lateral vibrations, extensive and destructive sample preparation is required. This work presents a new passive measurement technique that combines acoustic transmission measurements and lumped-element modelling. For diaphragms of different lengths, compliances between 0.08 × 10−15 and 1.04 × 10−15 m³/Pa are determined without using destructive or complex preparations. In particular, for lengths above 1000 µm, the results differ from numerical simulations by only 4% or less.
Share and Cite
MDPI and ACS Style
Becker, D.; Littwin, M.; Bittner, A.; Dehé, A.
Acoustic Transmission Measurements for Extracting the Mechanical Properties of Complex 3D MEMS Transducers. Micromachines 2024, 15, 1070.
https://doi.org/10.3390/mi15091070
AMA Style
Becker D, Littwin M, Bittner A, Dehé A.
Acoustic Transmission Measurements for Extracting the Mechanical Properties of Complex 3D MEMS Transducers. Micromachines. 2024; 15(9):1070.
https://doi.org/10.3390/mi15091070
Chicago/Turabian Style
Becker, Dennis, Moritz Littwin, Achim Bittner, and Alfons Dehé.
2024. "Acoustic Transmission Measurements for Extracting the Mechanical Properties of Complex 3D MEMS Transducers" Micromachines 15, no. 9: 1070.
https://doi.org/10.3390/mi15091070
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