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Journal: Micromachines, 2025
Volume: 16
Number: 1102

Article: Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics
Authors: by Mohammadreza Fasihanifard and Muthukumaran Packirisamy
Link: https://www.mdpi.com/2072-666X/16/10/1102

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