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Journal: Micromachines, 2015
Volume: 6
Number: 281
Article:
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators
Authors:
by
Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Liuhong Ma, Yongmei Zhao and Jin Ning
Link:
https://www.mdpi.com/2072-666X/6/2/281
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