Design and Analysis of MEMS Linear Phased Array
Abstract
:1. Introduction
2. MEMS Linear Phased Array Element Structure
Thickness of Si | Thickness of SiO2 | Thickness of ZnO | Length of Membrane |
---|---|---|---|
8 μm | 0.2 μm | 6 μm | 228 μm |
Material | Young’s Modulus (GPa) | Density (103 kg/m3) | Poisson Ratio |
---|---|---|---|
Si | 167 | 2.33 | 0.28 |
SiO2 | 72 | 2.30 | 0.16 |
ZnO | 120 | 5.68 | 0.446 |
3. MEMS Linear Phased Array Beam Directivity
- The directivity of a single element
- 2.
- The uniform linear array directivity
4. Optimization and Simulation
4.1. Optimization in the Elevation Direction (y-z Plane, α = α0 = 90°)
4.1.1. Main Lobe
4.1.2. Grating Lobe and Side Lobe
4.2. Optimization in the Lateral Direction (x-z Plane, α = α0 = 0°)
4.3. Simulation Results
5. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Fan, G.; Li, J.; Wang, C. Design and Analysis of MEMS Linear Phased Array. Micromachines 2016, 7, 8. https://doi.org/10.3390/mi7010008
Fan G, Li J, Wang C. Design and Analysis of MEMS Linear Phased Array. Micromachines. 2016; 7(1):8. https://doi.org/10.3390/mi7010008
Chicago/Turabian StyleFan, Guoxiang, Junhong Li, and Chenghao Wang. 2016. "Design and Analysis of MEMS Linear Phased Array" Micromachines 7, no. 1: 8. https://doi.org/10.3390/mi7010008