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Journal: Micromachines, 2018
Volume: 9
Number: 602

Article: Monolithic Multi Degree of Freedom (MDoF) Capacitive MEMS Accelerometers
Authors: by Zakriya Mohammed, Ibrahim (Abe) M. Elfadel and Mahmoud Rasras
Link: https://www.mdpi.com/2072-666X/9/11/602

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