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Journal: Lubricants, 2025
Volume: 13
Number: 301

Article: Tribo-Electrochemical Characterization of Brush-Scrubbed Post-CMP Cleaning: Results for Tartrate-Supported Removal of Residual Oxides from Copper Films
Authors: by Collin M. Reff, Kassapa U. Gamagedara, David R. Santefort and Dipankar Roy
Link: https://www.mdpi.com/2075-4442/13/7/301

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