XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures
Abstract
:1. Introduction
2. Experimental Section
3. Results and Discussion
3.1. SEM and AFM
3.2. XPS
3.3. Nanoindentation
3.4. Cylindrical Turning Experiments
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Deposition Temperature (°C) | N2 Flow Rate (sccm) |
---|---|
200 | 20, 40, 60 |
500 | 20, 40, 60 |
Temperature (°C) | Nitrogen Flow Rate (sccm) | Ti (at. %) | Al (at. %) |
---|---|---|---|
200 | 20 | 51.46 | 48.54 |
40 | 48.47 | 51.53 | |
60 | 55.22 | 44.78 | |
500 | 20 | 56.24 | 43.76 |
40 | 58.04 | 41.96 | |
60 | 51.92 | 36.09 |
Temperature (°C) | Nitrogen Flow Rate (sccm) | Thickness (µm) | RMS (nm) |
---|---|---|---|
200 | 20 | 1.64 | 6.5 |
40 | 1.35 | 2.2 | |
60 | 0.81 | 1.0 | |
500 | 20 | 1.12 | 8.2 |
40 | 0.62 | 13.0 | |
60 | 0.68 | 13.9 |
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Obrosov, A.; Gulyaev, R.; Ratzke, M.; Volinsky, A.A.; Bolz, S.; Naveed, M.; Weiß, S. XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures. Metals 2017, 7, 52. https://doi.org/10.3390/met7020052
Obrosov A, Gulyaev R, Ratzke M, Volinsky AA, Bolz S, Naveed M, Weiß S. XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures. Metals. 2017; 7(2):52. https://doi.org/10.3390/met7020052
Chicago/Turabian StyleObrosov, Aleksei, Roman Gulyaev, Markus Ratzke, Alex A. Volinsky, Sebastian Bolz, Muhammad Naveed, and Sabine Weiß. 2017. "XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures" Metals 7, no. 2: 52. https://doi.org/10.3390/met7020052