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Journal: Membranes, 2022
Volume: 12
Number: 346
Article:
Influence of Deposition Modes and Thermal Annealing on Residual Stresses in Magnetron-Sputtered YSZ Membranes
Authors:
by
Andrey Solovyev, Sergey Rabotkin, Anna Shipilova, Dmitrii Agarkov, Ilya Burmistrov and Alexander Shmakov
Link:
https://www.mdpi.com/2077-0375/12/3/346
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