Evaluation of Warpage and Residual Stress of Precision Glass Micro-Optics Heated by Carbide-Bonded Graphene Coating in Hot Embossing Process
Abstract
:1. Introduction
2. Materials and Methods
2.1. Carbide-Bonded Graphene Coating Based Hot Embossing Process
2.2. Deposition Method of Carbide-Bonding Graphene Coating
2.3. Schematic of CBG-Based Hot Embossing Process
2.4. Embossing Process and Experiment Setup
2.5. Finite Element Simulation of Embossing Process
3. Results
3.1. Characterization Results of the CBG Coating
3.2. Embossed Microlens Array with Curvature
3.3. Evolution of Geometrical Warpage and Residual Stress
3.4. Decreasing Top Warpage through Curvature Compensation
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Li, L.; Zhou, J. Evaluation of Warpage and Residual Stress of Precision Glass Micro-Optics Heated by Carbide-Bonded Graphene Coating in Hot Embossing Process. Nanomaterials 2021, 11, 363. https://doi.org/10.3390/nano11020363
Li L, Zhou J. Evaluation of Warpage and Residual Stress of Precision Glass Micro-Optics Heated by Carbide-Bonded Graphene Coating in Hot Embossing Process. Nanomaterials. 2021; 11(2):363. https://doi.org/10.3390/nano11020363
Chicago/Turabian StyleLi, Lihua, and Jian Zhou. 2021. "Evaluation of Warpage and Residual Stress of Precision Glass Micro-Optics Heated by Carbide-Bonded Graphene Coating in Hot Embossing Process" Nanomaterials 11, no. 2: 363. https://doi.org/10.3390/nano11020363