An Ultrahigh-Sensitivity Graphene Resonant Gyroscope
Abstract
:1. Introduction
2. The Operating Principle
2.1. Theoretical Basis of Resonant Gyroscope with Direct Frequency Output
2.2. Theoretical Analysis of Double-Clamped Graphene Resonant Beam
- (a)
- The central inertia axis of each section of the beam is in the same plane, and the beam moves laterally in this plane.
- (b)
- The ratio of the cross-sectional area size of the beam to its length is relatively small, and the influence of shear deformation and the moment of inertia around the central axis of the section can be ignored.
- (c)
- The transverse vibration of the beam conforms to the assumption of small deflection plane bending, i.e., the amplitude of the transverse vibration is very small and within the linear range.
3. Design and Simulation of Graphene Resonator Gyroscope
- (a)
- On the basis of silicon-based materials, single graphene beams are supported by intermolecular van der Waals forces in the etched grooves of the Si transfer beams, as shown in Figure 6b.
- (b)
- The mass block is driven to move in a simple and harmonic way in the y-axis direction. When the angular velocity in the z-axis direction is generated, as stated in Equation (1), the Coriolis force is generated in the x-axis direction.
- (c)
- The Coriolis force passes through the x-axis direction of the symmetrical Si transfer beam, which causes the Si transfer beam to generate axial strain, which in turn causes an axial stress change in the double-clamped graphene beam on the Si transmission beam, effectively changing the resonant frequency state of the graphene.
- (d)
- As stated in Equation (4), the magnitude of the angular velocity is demodulated by tuning the direct output frequency.
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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Si Geometric Parameters | Si Material Properties | ||||
Length (μm) | Width (μm) | Thickness (μm) | Young’s modulus (GPa) | Poisson ratio | Density (kg/m3) |
30 | 3 | 3 | 130 | 0.28 | 2330 |
Graphene Geometric Parameters | Graphene Material Properties | ||||
Length (μm) | Width (μm) | Thickness (nm) | Young’s modulus (GPa) | Poisson ratio | Density (kg/m3) |
3 | 1 | 0.335 | 1000 | 0.16 | 2200 |
Size (Length, Width, and Thickness) | Resonant Frequency of Experimental Data (MHz) | Resonant Frequency of Finite Element Simulation (MHz) | Error |
---|---|---|---|
1.1 μm× 1.93 μm × 0.3 nm | 5.4 [6] | 5.4983 | 1.82% |
2.8 μm × 0.5 μm × 6 nm | 17 [25] (The first frequency) | 16.933 | 0.39% |
46 [25] (The second frequency) | 46.992 | 2.1% | |
2.8 μm × 0.3 μm × 11 nm | 31 [25] | 30.986 | 0.04% |
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Lu, Y.; Guo, Z.-S.; Fan, S.-C. An Ultrahigh-Sensitivity Graphene Resonant Gyroscope. Nanomaterials 2021, 11, 1890. https://doi.org/10.3390/nano11081890
Lu Y, Guo Z-S, Fan S-C. An Ultrahigh-Sensitivity Graphene Resonant Gyroscope. Nanomaterials. 2021; 11(8):1890. https://doi.org/10.3390/nano11081890
Chicago/Turabian StyleLu, Yang, Zhan-She Guo, and Shang-Chun Fan. 2021. "An Ultrahigh-Sensitivity Graphene Resonant Gyroscope" Nanomaterials 11, no. 8: 1890. https://doi.org/10.3390/nano11081890