Order Article Reprints
Journal: Nanomaterials, 2023
Volume: 13
Number: 1765
Article:
High Performance On-Chip Energy Storage Capacitors with Plasma-Enhanced Atomic Layer-Deposited Hf0.5Zr0.5O2/Al-Doped Hf0.25Zr0.75O2 Nanofilms as Dielectrics
Authors:
by
Yuli He, Guang Zheng, Bao Zhu, Xiaohan Wu, Wen-Jun Liu, David Wei Zhang and Shi-Jin Ding
Link:
https://www.mdpi.com/2079-4991/13/11/1765
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