A Design of High-Efficiency: Vertical Accumulation Modulators Based on Silicon Photonics
Abstract
:1. Introduction
2. Principles and Methods
2.1. Principles
2.2. Methods
3. Results
3.1. Dielectric Layer Thickness
3.2. Doping Concentration
3.3. Modulator Geometric Factors
4. Discussion
Gate Material | Oxide | VπL (V·cm) | Loss (dB/cm) | α· VπL (dB·V) | Result Type |
---|---|---|---|---|---|
ITO [23] | Al2O3 | 0.052 | >1500 | >80 | Experimental |
ITO [24] | Al2O3 | 0.095 | 16,000 | 152 | Experimental |
InGaAsP [25] | Al2O3 | 0.047 | 4.6 | <1 | Experimental |
InP [26] | SiO2/Al2O3 | 0.54 | 2.3 | 1.24 | Experimental |
Poly-Si [7] | SiO2 | 1.8 | >30 | >48 | Experimental |
Poly-Si [29] | SiO2 | 0.886 | >18 | >16 | Numerical |
Poly-Si [9] | SiO2 | 0.2 | 65 | 13 | Experimental |
(This work) Poly-si | ZrO2 | 0.16 | 50 | 8.24 | Numerical |
5. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
- Luo, W.; Cao, L.; Shi, Y.; Wan, L.; Zhang, H.; Li, S.; Chen, G.; Li, Y.; Li, S.; Wang, Y. Recent progress in quantum photonic chips for quantum communication and internet. Light Sci. Appl. 2023, 12, 175. [Google Scholar] [CrossRef] [PubMed]
- Chen, Z.; Segev, M. Highlighting photonics: Looking into the next decade. ELight 2021, 1, 2. [Google Scholar] [CrossRef]
- Zhou, H.; Dong, J.; Cheng, J.; Dong, W.; Huang, C.; Shen, Y.; Zhang, Q.; Gu, M.; Qian, C.; Chen, H. Photonic matrix multiplication lights up photonic accelerator and beyond. Light Sci. Appl. 2022, 11, 30. [Google Scholar] [CrossRef] [PubMed]
- Noguchi, K.; Mitomi, O.; Kawano, K.; Yanagibashi, M. Highly efficient 40-GHz bandwidth Ti: LiNbO/sub 3/optical modulator employing ridge structure. IEEE Photonics Technol. Lett. 1993, 5, 52–54. [Google Scholar] [CrossRef]
- Amin, R.; Maiti, R.; George, J.K.; Ma, X.; Ma, Z.; Dalir, H.; Miscuglio, M.; Sorger, V.J. A lateral MOS-capacitor-enabled ITO Mach–Zehnder modulator for beam steering. J. Light. Technol. 2020, 38, 282–290. [Google Scholar] [CrossRef]
- Zangeneh Kamali, K.; Xu, L.; Gagrani, N.; Tan, H.H.; Jagadish, C.; Miroshnichenko, A.; Neshev, D.; Rahmani, M. Electrically programmable solid-state metasurfaces via flash localised heating. Light Sci. Appl. 2023, 12, 40. [Google Scholar] [CrossRef] [PubMed]
- Zhang, W.; Debnath, K.; Chen, B.; Li, K.; Liu, S.; Ebert, M.; Reynolds, J.D.; Khokhar, A.Z.; Littlejohns, C.; Byers, J. High bandwidth capacitance efficient silicon MOS modulator. J. Light. Technol. 2021, 39, 201–207. [Google Scholar] [CrossRef]
- Hanim, A.; Mardiana, B.; Hazura, H.; Saari, S. On the modulation phase efficiency of a silicon pin diode optical modulator. In Proceedings of the International Conference On Photonics 2010, Langkawi, Malaysia, 5–7 July 2010; pp. 1–3. [Google Scholar] [CrossRef]
- Webster, M.; Gothoskar, P.; Patel, V.; Piede, D.; Anderson, S.; Tummidi, R.; Adams, D.; Appel, C.; Metz, P.; Sunder, S. An efficient MOS-capacitor based silicon modulator and CMOS drivers for optical transmitters. In Proceedings of the 11th International Conference on Group IV Photonics (GFP), Paris, France, 27–29 August 2014; pp. 1–2. [Google Scholar]
- Yang, Y.; Fang, Q.; Yu, M.; Tu, X.; Rusli, R.; Lo, G.-Q. High-efficiency Si optical modulator using Cu travelling-wave electrode. Optics Express 2014, 22, 29978–29985. [Google Scholar] [CrossRef]
- Fujikata, J.; Ushida, J.; Ming-Bin, Y.; ShiYang, Z.; Liang, D.; Guo-Qiang, P.L.; Kwong, D.-L.; Nakamura, T. 25 GHz operation of silicon optical modulator with projection MOS structure. In Proceedings of the Optical Fiber Communication Conference, San Diego, CA, USA, 21–25 March 2010. p. OMI3. [Google Scholar]
- Liu, A.; Jones, R.; Liao, L.; Samara-Rubio, D.; Rubin, D.; Cohen, O.; Nicolaescu, R.; Paniccia, M. A high-speed silicon optical modulator based on a metal–oxide–semiconductor capacitor. Nature 2004, 427, 615–618. [Google Scholar] [CrossRef]
- Debnath, K.; Thomson, D.J.; Zhang, W.; Khokhar, A.Z.; Littlejohns, C.; Byers, J.; Mastronardi, L.; Husain, M.K.; Ibukuro, K.; Gardes, F.Y. All-silicon carrier accumulation modulator based on a lateral metal-oxide-semiconductor capacitor. Photonics Res. 2018, 6, 373–379. [Google Scholar] [CrossRef]
- Liu, J.; Li, J.; Wu, J.; Sun, J. Structure and dielectric property of high-k ZrO2 films grown by atomic layer deposition using tetrakis (dimethylamido) zirconium and ozone. Nanoscale Res. Lett. 2019, 14, 1–12. [Google Scholar] [CrossRef] [PubMed]
- Li, Y.; Tang, X.; Xu, G.; Li, H.; He, S.; Hu, X.; Su, X.; Bai, W.; Lu, D.; Long, S. The Effects of Postdeposition Anneal and Postmetallization Anneal on Electrical Properties of TiN/ZrO2/TiN Capacitors. IEEE Trans. Electron Devices 2022, 70, 59–64. [Google Scholar] [CrossRef]
- Deshmane, V.G.; Adewuyi, Y.G. Synthesis of thermally stable, high surface area, nanocrystalline mesoporous tetragonal zirconium dioxide (ZrO2): Effects of different process parameters. Microporous Mesoporous Mater. 2012, 148, 88–100. [Google Scholar] [CrossRef]
- Robertson, J.; Wallace, R.M. High-K materials and metal gates for CMOS applications. Mater. Sci. Eng. R Rep. 2015, 88, 1–41. [Google Scholar] [CrossRef]
- Manipatruni, S.; Xu, Q.; Schmidt, B.; Shakya, J.; Lipson, M. High speed carrier injection 18 Gb/s silicon micro-ring electro-optic modulator. In Proceedings of the LEOS 2007-IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings, Lake Buena Vista, FL, USA, 21–25 October 2007; pp. 537–538. [Google Scholar] [CrossRef]
- Wang, J.; Qiu, C.; Li, H.; Ling, W.; Li, L.; Pang, A.; Sheng, Z.; Wu, A.; Wang, X.; Zou, S. Optimization and demonstration of a large-bandwidth carrier-depletion silicon optical modulator. J. Light. Technol. 2013, 31, 4119–4125. [Google Scholar] [CrossRef]
- Félix Rosa, M.; Rathgeber, L.; Elster, R.; Hoppe, N.; Föhn, T.; Schmidt, M.; Vogel, W.; Berroth, M. Design of a carrier-depletion Mach-Zehnder modulator in 250 nm silicon-on-insulator technology. Adv. Radio Sci. 2017, 15, 269–281. [Google Scholar] [CrossRef]
- Marpaung, D.; Yao, J.; Capmany, J. Integrated microwave photonics. Nat. Photonics 2019, 13, 80–90. [Google Scholar] [CrossRef]
- Soref, R.; Bennett, B. Electrooptical effects in silicon. IEEE J. Quantum Electron. 1987, 23, 123–129. [Google Scholar] [CrossRef]
- Amin, R.; Maiti, R.; Carfano, C.; Ma, Z.; Tahersima, M.H.; Lilach, Y.; Ratnayake, D.; Dalir, H.; Sorger, V.J. 0.52 V mm ITO-based Mach-Zehnder modulator in silicon photonics. APL Photonics 2018, 3, 126104. [Google Scholar] [CrossRef]
- Amin, R.; Maiti, R.; Gui, Y.; Suer, C.; Miscuglio, M.; Heidari, E.; Chen, R.T.; Dalir, H.; Sorger, V.J. Sub-wavelength GHz-fast broadband ITO Mach–Zehnder modulator on silicon photonics. Optica 2020, 7, 333–335. [Google Scholar] [CrossRef]
- Han, J.-H.; Boeuf, F.; Fujikata, J.; Takahashi, S.; Takagi, S.; Takenaka, M. Efficient low-loss InGaAsP/Si hybrid MOS optical modulator. Nat. Photonics 2017, 11, 486–490. [Google Scholar] [CrossRef]
- Ohno, S.; Li, Q.; Sekine, N.; Fujikata, J.; Noguchi, M.; Takahashi, S.; Toprasertpong, K.; Takagi, S.; Takenaka, M. Taperless Si hybrid optical phase shifter based on a metal-oxide-semiconductor capacitor using an ultrathin InP membrane. Optics Express 2020, 28, 35663–35673. [Google Scholar] [CrossRef] [PubMed]
- Kononchuk, O.; Nguyen, B.-Y. Silicon-on-Insulator (Soi) Technology: Manufacture and Applications; Elsevier: Amsterdam, The Netherlands, 2014. [Google Scholar]
- Witzens, J. High-speed silicon photonics modulators. Proc. IEEE 2018, 106, 2158–2182. [Google Scholar] [CrossRef]
- Passaro, V.M.; Dell’Olio, F. Scaling and optimization of MOS optical modulators in nanometer SOI waveguides. IEEE Trans. Nanotechnol. 2008, 7, 401–408. [Google Scholar] [CrossRef]
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Zhou, Z.; Li, Z.; Qiu, C.; Chen, Y.; Xu, Y.; Zhang, X.; Qiao, Y.; Wang, Y.; Liang, L.; Lei, Y.; et al. A Design of High-Efficiency: Vertical Accumulation Modulators Based on Silicon Photonics. Nanomaterials 2023, 13, 3157. https://doi.org/10.3390/nano13243157
Zhou Z, Li Z, Qiu C, Chen Y, Xu Y, Zhang X, Qiao Y, Wang Y, Liang L, Lei Y, et al. A Design of High-Efficiency: Vertical Accumulation Modulators Based on Silicon Photonics. Nanomaterials. 2023; 13(24):3157. https://doi.org/10.3390/nano13243157
Chicago/Turabian StyleZhou, Zhipeng, Zean Li, Cheng Qiu, Yongyi Chen, Yingshuai Xu, Xunyu Zhang, Yiman Qiao, Yubing Wang, Lei Liang, Yuxin Lei, and et al. 2023. "A Design of High-Efficiency: Vertical Accumulation Modulators Based on Silicon Photonics" Nanomaterials 13, no. 24: 3157. https://doi.org/10.3390/nano13243157