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Journal: Nanomaterials, 2023
Volume: 13
Number: 868
Article:
A Novel Source/Drain Extension Scheme with Laser-Spike Annealing for Nanosheet Field-Effect Transistors in 3D ICs
Authors:
by
Sanguk Lee, Jinsu Jeong, Bohyeon Kang, Seunghwan Lee, Junjong Lee, Jaewan Lim, Hyeonjun Hwang, Sungmin Ahn and Rockhyun Baek
Link:
https://www.mdpi.com/2079-4991/13/5/868
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