3.1. Micro-Plasma Discharge Behavior and Ceramic Film Voltage Characteristics
The micro-plasma discharge occurring on the surface of aluminum alloy constitutes a complex dielectric barrier discharge, which serves as the defining characteristic of micro- arc oxidation (MAO). This discharge phenomenon includes breakdown of the alumina film in both solid and gas mediums due to redox reactions. Multiphase surface discharges within micropores may also occur, which can directly influence mass transfer and phase change dynamics during the ceramic film growth process. Consequently, the growth state of the ceramic film can be effectively elucidated by monitoring plasma discharge behavior and dynamic voltage variations applied to the sample [
13]. The micro-plasma discharge behavior and the dynamic voltage curve under the action of positive and negative pulses during the growth of the ceramic film of sample # 9 are shown in
Figure 2. By examining the evolution of the positive voltage signal and the characteristics of micro-plasma discharge, the growth process of the ceramic film can be delineated into five distinct stages.
During the initial stage (Stage I), the positive voltage exhibits a rapid escalation, reaching 430V within a minute, marking the conclusion of the initial rapid rise phase. Simultaneously, the negative voltage undergoes a rapid increase to approximately -80V in a nearly linear fashion. Notably, during this period, swiftly moving micro-plasma discharge spots emerge on the sample’s surface, albeit with relatively weak discharge sparks. The duration of most discharge spots does not exceed ten microseconds. This phase indicates the surface passivation process and the initial formation of the alumina film [
14,
15].
Stage II spans from 1 min to 21 min, during which the rate of voltage rise for both positive and negative electrodes diminish to less than one-fifth of that observed in the preceding stage. This period is characterized by a gradual and slow voltage rise. Notably, large-scale discharge spots begin to manifest on the sample’s surface, accompanied by an increase in the duration of discharge spots. Within this stage, discharge predominantly occurs in weak areas of insulation within the ceramic layer, resulting in two distinct discharge characteristics. The initial symptom is the presence of large orange discharge spots that tend to reoccur in the same areas and gradually diminish over time. The second characteristic comprises small, short-lived white bright discharge spots, exhibiting random breakdown positions and significant jumps. The collective discharge spot phenomenon demonstrates the coexistence of short-term, freely moving small spots and long-term, slowly moving large spots on the sample surface. The thickening mechanism of the ceramic film in this stage primarily involves deposition sintering, with amorphous alumina undergoing rapid crystallization under discharge conditions. Previous research indicates that γ-alumina remains the dominant phase within the ceramic film.
21 min later, a notable decrease in positive voltage ensues, stabilizing at 23 min with an approximate reduction of 20%. This sequence delineates stage III, characterized by a sudden drop in both positive and negative voltages. Stage III typically denotes the transition of micro-arc discharge into the ‘soft spark’ discharge mode [
16]. Within this stage, plasma discharge spots diminish significantly, accompanied by the rapid disappearance of short-term, freely moving small spot discharges, and a gradual decrease in the number of long-term, slowly moving large spot discharges until their cessation.
Subsequently, from 23 min to 55 min, stage IV unfolds, during which the positive electrode voltage undergoes slight directional changes, experiencing an increase of approximately 20 V. This stage is succeeded by stage V, spanning from 55 min until the conclusion of micro-arc oxidation, characterized by the gradual and sustained decrease in positive electrode voltage. During both stage IV and stage V, a gradual upward trend in negative voltage is evident, indicative of the ‘soft spark’ mode discharge characteristic. The stages are identified by sporadic weak micro-plasma discharges on the sample’s surface. These discharges appear as small spots with short durations, as shown in
Figure 3 where the discharge positions are highlighted by circles. Notably, at this juncture, light emanates from within the sample, suggesting a transfer of micro-plasma discharge positions to the interior of the ceramic film, thereby resulting in the diminishing occurrence of penetrating discharge. Throughout these stages, the thickening mechanism of alumina ceramics undergoes a notable transition from deposition sintering to a combined process involving deposition sintering at the surface of the ceramic membrane and oxygen permeation at the base of the ceramic membrane. At the same time, the internal discharges within the ceramic film accelerate the crystallization and phase transformation of alumina.
Figure 3 shows the current and voltage pulse waveform recorded on sample #9 at the midpoint of each of the five stages during the ceramic film growth process. In constant current mode, the current does not change and the voltage changes passively. The
Figure 3a illustrates the presence of burrs and spikes in the actual output current waveform. Notably, as the oxidation time increases, it is observed in the
Figure 3b that the duration of the rising edge of the positive pulse elongates, while the falling edge of the negative pulse similarly extends. If one were to conceptualize the metal matrix, ceramic membrane, electrolyte, and stainless steel electrode system as an equivalent composite dielectric capacitor model within the circuit framework, the time constant of this equivalent circuit system progressively increases. Furthermore, considering the perspective of crystallization phase transition, the relaxation time of the alternating polarization process of the ceramic film also experiences an increase. Significantly, from stage I to stage V, subsequent to the decline in the positive voltage line, although the voltage may experience a rise, both the maximum rise value and the termination voltage are markedly lower than the voltage preceding the voltage drop. Conversely, the negative voltage exhibits a slow rise following the voltage drop, with the termination voltage surpassing the voltage level prior to the drop.
3.2. The Voltage Variation Law of Ceramic Membrane Growth Process under Different Positive and Negative Pulses
Figure 4 illustrates the voltage change curves of 12 sample groups during the preparation process under various combinations of positive and negative pulses. It is apparent from the diagram that the voltage curves exhibit significant differences across different values of
Ja and R, indicative of distinct growth processes of alumina.
Figure 4 shows the voltage change curves of 12 sample groups during the preparation process under various combinations of positive and negative pulses. The diagram highlights significant differences in the voltage curves across different values of
Ja and R, indicating distinct growth processes of alumina. Characteristic signals for analysis include transition time (
T), transition point voltage (
U,
U′), and the average rate of voltage change (
k,
k′) during growth stages I to IV. It is important to note that due to the experimental time constraint of 100 min, some samples did not progress beyond stage III.
The voltage curves of the 12 sample groups depicted in
Figure 4 exhibit minimal divergence in stage I. However, differences in subsequent stages are persistently compared and analyzed.
Figure 5 presents a comparative analysis of
T,
U, and
k in the voltage curves of the film-forming process during growth stages II and III under varying
Ja and R values. (a), (b), (d), (f) are positive voltage curve, (c), (e), (g) are negative voltage curve.
Notably, the change trends of T, U, and k in the negative voltage curve closely mirror those observed in the positive direction. In
Figure 5a, it is evident that the
T2 time of the process voltage curve for the ceramic film obtained under
Ja = 10A/dm
2and
R = 1.1 occurs at the latest time, 44 min. Conversely, the
T2 time under
Ja = 16A/dm
2and
R = 1.3 is the earliest, manifesting at 16 min, preceding the former by 28 min. Notably, the change trends of
T,
U, and
k in the negative voltage curve closely mirror those observed in the positive direction.
When R remains constant,
T2 advances with increasing
Ja. Conversely, for a fixed
Ja,
T2 advances with increasing
R. Similarly,
T′
2 follows a similar trend. Hence, the onset time for entering the ‘soft spark’ discharge mode can be advanced by appropriately increasing both the current density and the intensity of the negative pulse. In
Figure 5c, it is observed that the forward voltage peak
U2 of the ceramic membrane process voltage curve obtained at
Ja = 12 A/dm
2,
R = 1.3 is the smallest, measuring 509 V. Conversely, at
Ja = 16 A/dm
2,
R = 1.1,
U2 is the largest, reaching 523 V, representing an increase of approximately 2.7%.
Under the same
Ja,
U2 decreases with increasing
R. Conversely, for a fixed
R, U
2 follows a
U-shaped curve in response to the increase in
Ja. In the left half of the
U-shaped curve, characterized by a lower range of
Ja,
U2 decreases, primarily influenced by the advance of
T2, resulting in a limited increase in voltage. However, with a further increase in
Ja, the growth rate of the ceramic film accelerates, leading to a higher positive electrode breakdown voltage.
Figure 5e,g illustrate that the average voltage change rates,
k2 and
k3, of ceramic membranes during growth stages II and III both increase with rising values of
Ja and
R, ascending from 2V/min and −0.2 V/min to 4.5 V/min and −15 V/min, respectively. Consequently, augmenting
Ja and
R facilitates rapid growth and deposition of ceramic membranes in stage II, while adjusting the voltage drop in stage III can modulate the growth state of alumina.
Figure 4 and
Figure 5 examine the effect of positive and negative pulses on the growth process of ceramic films in stages I, II, and III. Next, the influence of different positive and negative pulses on the growth process of ceramic films in stages IV and V was analyzed using samples #5, #8, and #11, where R is 1.2 and
Ja gradually increases. The effect of current density,
Ja, on the process voltage in growth stages IV and V (
T,
U,
k) is presented in
Figure 6.
In
Figure 6, (a), (b), (d) are positive voltage curve, (c), (e) are negative voltage curve. It is notable that the change trend of the negative electrode voltage-time response curve aligns closely with that of the positive electrode process. As depicted in
Figure 6, with the increase of
Ja,
T3 (
T′
3) and
T4 (
T′
4) advance at the time of entering stage IV and V, respectively, while the corresponding initial voltage values
U3 (
U′
3) and
U4 (
U′
4) decrease. Furthermore, the average change rates k4 (
k′
4) and k5 (
k′
5) of stages IV and V increase with the rise of
Ja. Notably,
k4 approaches 0, while
k5 varies between −0.5 and −1.7 V/min.
The above findings highlight that the positive and negative current density parameters have a significant impact on the initiation time (T), reaction rate, and process voltage value (U) of each growth stage. Strengthening the cathode pulse effect or elevating the current density level effectively enhances the reaction conditions of micro-arc oxidation in each stage, leading to the advancement of T and an acceleration in the voltage drop rate (k) before entering the soft spark mode. In stages II and III, the initial voltage value (U) of each stage initially decreases and then increases with the increase of Ja, while it decreases with the rise of R. Conversely, in stages IV and V, U decreases as Ja increases. Moreover, a model can be developed based on the corresponding description of the microstructure and properties of the ceramic membrane derived from characteristic voltage curves. This model enables the online evaluation of the film growth state through voltage process monitoring.
3.3. Surface Morphology and Structural Molecules of the Ceramic Film under Different Positive and Negative Pulses
Figure 7 presents the surface morphology of 12 groups of ceramic films subjected to different positive and negative pulses. Three images were taken of each sample, increasing in magnification when viewed from left to right. It is evident from the figure that the surface of the ceramic film is rough in all samples and consists of “cake-like” projections, sintered and fused particles, pores and cracks. The bulging micropores serve as channels for electrolyte-matrix reactions and as eruption channels for molten oxides generated during these reactions. The ceramic film, under the high temperature of micro-arc conditions, predominantly centers around these micropores. Oxides continue to melt, rapidly solidify, and amalgamate to form a porous structure. The stress induced by volume shrinkage during melt solidification gives rise to microcracks, with micropores serving as the source of crack initiation [
17].
When Ja remains constant, an increase in R results in the observation of more layered amorphous regions in the bright regions of the film surface topography. The pore size of the discharge molten pool decreases, while the amount of melt increases. The surface flow distribution morphology becomes more pronounced, with elongated and thin melt flow patterns. The spherical protrusions of the eruption column weaken, with blurred contours, reduced height, and increased debris from attached eruption products.
When R remains constant, an increase in Ja results in a heightening of the eruption column in the volcanic shape. This indicates an augmentation in the gas volume within the discharge channel, leading to a reinforcement of the discharge intensity. Consequently, there is an escalation in the resistance to the outward ejection of the melt during the film-forming process, resulting in increased melting depth, enhanced concavity, and enlarged pore size of the melting pool. Moreover, the discharge behavior propagates through the cavity in a fissure type eruption, further contributing to an increase in the overlapping melt pool structure. This leads to a more abundant spongy porous structure distributed on the surface. Additionally, there is an uptick in the number of ceramic spherical product particles sputtered during the discharge film-forming process.
Figure 8 depicts the surface roughness measurement results of 12 groups of ceramic films. The roughness
Ra of the ceramic films falls within the range of 4–8 μm. Notably, sample #10 exhibits the highest roughness, while sample #3 displays the lowest. The roughness value of the ceramic film decreases with increasing R and increases with rising
Ja. Upon examination of the surface morphology observed in
Figure 8, it can be concluded that the former is attributed to the heightened distribution of molten oxides on the ceramic film surface, while the latter is attributed to the higher number of ceramic ball particles scattered on the surface.
Figure 9 presents a comparison of the center and edge film thickness of the 12 groups of ceramic films, including the difference between the two. The inconsistent film thickness of the ceramic film in different regions stems from the selective growth of the film induced by the uneven distribution of current on the sample surface. The primary factor contributing to the variation in film thickness between the middle plane and the edge is the interface type. While the plane and the electrolyte exhibit two-dimensional unidirectional contact, the edge and the electrolyte involve spatially multi-angle contact. As a result, atoms at the interface deviate from their equilibrium positions to differing extents, leading to an increase in energy. This increase in energy is referred to as interface energy. Notably, the interface energy of the system at the edge surpasses that of the plane area, resulting in an overall increase in the system’s internal energy and a tendency towards stability in the region. On the other hand, the specific surface area of atoms and ions at the edges and vertices exceeds that of the planar region, facilitating the adsorption of negatively charged micelles in the electrolyte and the formation of discharge centers. These factors contribute to the propensity for breakdown and preferential growth at the film edges. As the ceramic film thickness increases, edge growth stops because it becomes more difficult to break down, resulting in a notable growth rate improvement at the center of the film [
18]. The results from
Figure 9 reveal that the center-edge difference in ceramic film thickness is most pronounced in samples #3 and #1, measuring 15 μm and −15 μm, respectively. Spatial distribution differences in ceramic film thickness are minimal under
R = 1.2 parameters, nearly approaching 0. When
Ja remains constant, the growth of ceramic films after 100 min of treatment at
R = 1.1, 1.2, and 1.3 results in intermediate thickness, uniform thickness, and edge thickness, respectively. This may be attributed to the fact that increasing
R promotes the dissolution reaction (1) of the film layer at the electrolyte/film interface during cathode pulse, thereby slowing the film surface growth rate and inhibiting edge preferential growth mode [
19]. From the trend of change, continuing to increase
Ja, the thickness difference between the center and the edge of the ceramic film will be infinitely close to zero.
By considering the original surface of the aluminum substrate as the reference line, it was observed that the new ceramic coating formed both above and below this line. The region extending from the reference line to the electrolyte/coating interface was designated as the outward growth behavior of the coating, while the region from the reference line to the coating/substrate interface was characterized as the inward growth behavior of the coating. The mechanism for the growth of micro-arc oxidation alumina ceramic coating stems from the movement of Al
3+ and ions containing oxygen atoms under the influence of a high electric field (O
2− and OH
−). Specifically, Al
3+ migrates outward through the alumina coating, leading to the formation of a new oxide film at the electrolyte/coating interface. Simultaneously, O
2− and OH
− ions move inward through the oxide film, resulting in the formation of a new oxide film at the coating/substrate interface [
20,
21]. The reactions (2), (3), (4) are as follows:
The substrate/film interface:
The Film/electrolyte interface in addition to the above reactions, there are
Figure 10 illustrates the disparity between the internal and external growth of the 12 groups of ceramic membranes. It is evident from the figure that the thickness of the outward growth of the ceramic membrane under different current density parameters exceeds 50% of the total thickness, consistently displaying stronger outward growth behavior compared to inward growth. Of the samples tested, sample #7 had the smallest inward growth thickness and proportion of ceramic membrane, resulting in a matrix erosion ratio of 11%. Conversely, sample #12 exhibits the largest inward growth thickness and proportion, with a matrix erosion ratio of 46%.
Overall, when Ja remains constant, an increase in R results in an increase in the inward growth thickness of the ceramic film, accompanied by a decrease in outward growth thickness and an increase in substrate erosion ratio. This phenomenon may be attributed to the intensified dissolution reaction at the electrolyte/film interface during the cathode pulse. Consequently, the growth behavior of Al3+ outwards and its combination with oxide formation is inhibited, thereby reducing the outward growth rate of the film. As Ja increases while R remains constant, the outward growth thickness and inward growth thickness of the film increase. Specifically, when Ja is less than or equal to 14 A/dm2, increasing Ja, the outward growth thickness of the ceramic film increases more significantly, with the outward growth behavior of the film being the main contributor to the thickness increase. When Ja reaches 16 A/dm2, the thickness of the ceramic film increased even more.
When R remains constant, an increase in Ja results in a simultaneous increase in both outward and inward growth thicknesses of the film. Particularly, when Ja ≤ 14 A/dm2, elevating Ja leads to a more significant increase in the outward growth thickness of the ceramic film, with outward growth behavior being the primary contributor to thickness augmentation. However, as Ja reaches 16 A/dm2 and Ja continues to rise, which will leads to more inward growth thicknesses of the film. This phenomenon can be attributed to several factors. On the one hand, the increase of the output energy during the pulse makes the film/substrate interface produce more molten reactants due to the instantaneous high temperature. On the other hand, the increase of the film thickness may further inhibit the outward migration of Al3+.Under the combined action of the two, the ceramic film preferentially grows inward.
Figure 11 illustrates the density comparison of 12 groups of ceramic membranes, alongside the corresponding film weight data. The two curves depicting density and film quality exhibit a similar trend with changes in current parameters. Notably, the density of the #1 ceramic film, prepared with
Ja = 10A/dm
2 and
R = 1.1, is the highest at 0.0015 g·mm
−3. Conversely, the density of the No.12 ceramic film, prepared with
Ja = 16 A/dm
2 and
R = 1.3, is the lowest, measuring only 0.0009 g·mm
−3, marking a decrease of 40%. When
Ja remains constant, an increase in R leads to a linear decrease in both the weight and density of the film. This observation suggests that heightened cathode pulse intensity is not conducive to the growth of alumina grains, resulting in decreased film density. Conversely, when
R is constant, an increase in
Ja enhances the quality of the ceramic membrane but reduces its density. This indicates that while increased pulse energy accelerates the film formation process, the resulting particles are loose, thereby decreasing film density.
Figure 12 depicts the X-ray diffraction pattern of 12 groups of ceramic membranes, revealing that the micro-arc oxidation film primarily comprises α-Al
2O
3 and γ-Al
2O
3, with γ-Al
2O
3 being predominant. The card numbers are 85-1327(Al), 88-0826(α-Al
2O
3), 79-1558 and 80-0956(γ-Al
2O
3). This dominance of γ-Al
2O
3 is attributed to the high temperatures generated during the film formation process, leading to the oxidation of most aluminum alloy surfaces to γ-Al
2O
3. Only during the ultra-high temperature stages of intense discharge does a small portion of γ-Al
2O
3 convert to α-Al
2O
3.
Based on the results presented in
Figure 12, quantitative analysis was conducted using Jade software to determine the crystallinity, grain size, and relative content of the ceramic membrane, as shown in
Figure 13.
Figure 13a illustrates that the grain size of γ-Al
2O
3 crystals in the micro-arc oxidation ceramic film increases with the augmentation of
R and
Ja, ranging from a maximum of 35 nm to a minimum of 25 nm. Conversely, the crystallinity decreases with the increase of R and
Ja, reaching a peak of 97% and a low of 84%, respectively. These results suggest that the intensification of cathode pulse action accelerates the dissolution of small grains, facilitating their orientation into larger grains. Furthermore, the augmentation of pulse energy promotes the recrystallization process from small to large grains, thereby increasing the grain size. In
Figure 13b, the relative content of α-Al
2O
3 and γ-Al
2O
3 in the ceramic film decreases from 0.4 to 0.1 with the augmentation of R and
Ja. This trend suggests that the conversion of γ-Al
2O
3 phase into α-Al
2O
3 is reduced, and the increase in
R and
Ja further diminishes the phase inversion rate. It is important to note that the maximum penetration ability of X-rays is only in the range of tens of microns. Therefore, the discussion of the ceramic membrane’s phase composition pertains to the surface thickness of tens of microns.
3.4. The Cross-Sectional Morphology and Structure of the Ceramic Film
Figure 14 depicts the cross-sectional morphology of the 12 groups of ceramic films along the thickness direction of the film layer. Two images were attached to each sample. The left side presents the overall cross-sectional map from the surface of the film layer to the substrate, while the right side displays a high-magnification map of the interface between the ceramic film layer and the substrate transition layer. As can be seen from the
Figure 14a, the cross-section of the film layer can be roughly divided into three regions with different volume percentages: the transition layer, the dense layer, and the surface pore layer. The transition layer, combined with the substrate metallurgy, is only a few micrometers thick. The dense layer which constitutes 60–70% of the total film layer, has a compact structure. The surface pore layer, which has a loose structure, makes up the remaining percentage. Micropores are distributed with varying heights and sizes, resulting in surface unevenness. Discharge reaction channels and residual holes from the reaction are dispersed within the film layer. Furthermore, it is evident that the flatness of the ceramic film surface is primarily influenced by the height of the eruption column of the volcanic morphology of the outer porous layer.
When the current density (
Ja) remains constant, an increase in the pulse voltage (
R) leads to a tendency towards a flatter volcanic morphology on the surface of the ceramic film. Conversely, when the current density increases while
R remains unchanged, the fluctuation of the volcanic morphology on the film surface intensifies, consistent with the previously measured changes in roughness. Examining the high-magnification diagram of the interface between the ceramic film layer and the substrate transition layer in the right column of
Figure 14 reveals clear wavy boundary structures in the transition layers of most ceramic films. These layers exhibit good bonding states, devoid of structural defects, and are dispersed with irregular blocks and powder oxides. However, the degree of undulation in the wavy boundary varies among ceramic films produced under different current density parameters. For samples #11 and #12, excessive
Ja may lead to concentrated stress from gas release during the discharge growth of ceramic membranes, resulting in the formation of penetrating cracks in the relatively weak surface pore layer and transition layer.
Photographs of the cavity structure in each area of the ceramic membrane section were captured using high power electron microscopy, as depicted in
Figure 15. The images reveal that the cavity size within the surface porous layer is the largest, exhibiting a honeycomb-like structure, likely resulting from intermittent bubble group explosions. Conversely, the number of cavity structures at the junction of the dense layer and the porous layer, as well as the transition layer near the matrix side, is small, and their size is compact. In
Figure 15, a slender body structure formed through dynamic solidification of molten material along the crack is evident, thus corroborating previous observations.
In accordance with the cross-section SEM image of the #9 ceramic film in
Figure 14, a perpendicular line segment was drawn from the film layer’s surface to the substrate side for line-scanning EDS elemental analysis, as shown in
Figure 16. The abscissa’s zero point corresponds to the outer surface of the ceramic film near the electrolyte side. Examination of the results reveals that the micro-arc oxidation ceramic film is primarily composed of O and A, with smaller quantities of Si, K and Na from the electrolyte. Notably, the Al element is the most prevalent, constituting over 50%, followed by O. The distribution of O and Na elements is relatively uniform throughout the film, whereas Si and K elements exhibit a distinct peak within the 20 μm wide surface porous layer of the ceramic membrane, with even dispersion in other membrane layer areas. The distribution of Al element increases gradiently in the near-surface area of the ceramic membrane about 2 μm and the transition layer in contact with the matrix. It can also be judged that these two areas are mainly responsible for the subsequent outward and inward growth of the ceramic membrane. There is a valley value of Al element distribution in the film layer corresponding to the peak distribution of Si and K elements. This local unbalanced element distribution may be affected by the formation defects of the porous layer of the ceramic film.
3.5. Distribution of Hardness of Cross-Section
Figure 17 illustrates the microhardness distribution across the cross-section of the ceramic film at various current densities, along with the corresponding cross-sectional morphologies. The green lines indicate the original substrate surface before the micro-arc oxidation treatment, while the red wire frames outline areas in the ceramic film cross-section that exceed 1200 HV.
Figure 17 shows that the cross-sectional hardness of the 12 groups of ceramic films varies due to the formation of different structures and phase compositions from the inside to the outside of the substrate during the growth of the film. The cross-sectional hardness of the 12 groups of ceramic films in the figure shows the distribution characteristics of soft-hard-soft discontinuous regions. The ceramic film proximate to the outer surface of the original substrate exhibits the highest hardness with minimal gradient change. Apart from the ceramic films from #11 and #12 samples, the other ten groups of films have a hardness exceeding 1400 HV, with a high hardness region extending approximately 20–50 μm near the outer substrate surface (exceeding 1200 HV), constituting approximately 20–30% of the total film thickness. This high-hardness area extends in both directions, with hardness decreasing rapidly. It is suggested that the favorable thermal insulation environment in this region promotes high-quality phase transition from γ-Al
2O
3 to α-Al
2O
3, significantly increasing α-Al
2O
3 content. In accordance with the morphology diagram, it is evident that the high hardness zone extends laterally from both sides of the substrate towards the outer film surface, exhibiting a certain width of columnar crystal morphology. This suggests that the internal temperature uniformity and thermal insulation within this region are superior, while significant temperature gradients exist outside this area. Notably, the columnar crystals formed towards the substrate side are perpendicular to the substrate surface, whereas those formed towards the outer film surface develop in a dendritic morphology. The state of the oxide appears relatively loose, likely attributed to electrolyte penetration into the micropores.
A detailed comparison of the cross-sectional hardness distribution among ceramic films #1 to #10 depicted in
Figure 17 reveals distinct patterns. Notably, the ceramic film produced under
Ja = 14 A/dm
2,
R = 1.3 exhibits the narrowest high hardness area, measuring 24 μm, while the film derived from
Ja = 12 A/dm
2,
R = 1.1 displays the widest high hardness zone, spanning 50 μm—an increase of 108%. This trend suggests that, with a constant
R, increasing
Ja results in thicker films, limiting the transmission of heat energy from the substrate to the film surface during discharge. Consequently, this phenomenon reduces the α-Al
2O
3 phase conversion rate and surface hardness, while concurrently widening the high hardness region within the film. Overall, the average film hardness increases with escalating
Ja.
Conversely, if Ja remains constant, increasing R leads to a narrower high hardness zone within the film, accompanied by an increase in depth. This outcome suggests that the outward growth behavior of the ceramic film is inhibited under these conditions. Notably, ceramic films #11 and #12 exhibit the highest hardness of approximately 900 and 800 HV, respectively. This discrepancy may be attributed to the compromised integrity of the transition layer in these samples, resulting in inadequate thermal insulation and hindering the phase transition from γ-Al2O3 to high hardness α-Al2O3. Consequently, the overall film hardness is diminished.