3. Results and Discussion
Figure 1a shows a high-resolution X-ray diffraction (HR-XRD) ω/2θ scan spectrum to evaluate the crystalline characterization of Ga
2O
3 film grown on a Pt/sapphire template using an RF sputtering system. Two distinct peaks were observed at 41.6° for Al
2O
3 (006) and 39.7° for Pt (111), but no peaks corresponding to the Ga
2O
3 phase were detected. The inset showed the structure of the Ga
2O
3/Pt/sapphire used for XRD measurements. The results confirmed the presence of diffraction peaks corresponding and the sapphire substrate. These results suggest that the Ga
2O
3 thin film produced through RF sputtering is amorphous, lacking a specific crystal structure.
Figure 1b shows the surface structure of the Ga
2O
3/Pt/sapphire obtained from AFM. The surface exhibits extremely small grains, tens of nanometers in size, with a root mean square (RMS) roughness of 0.22 nm. This grain size is significantly smaller than that typically observed in Ga
2O
3 thin films grown through crystallization. The grains are so small that it is difficult to discern any crystallization growth, indicating that the Ga
2O
3 thin films produced by RF sputtering are amorphous rather than crystalline. This observation is consistent with HR-XRD results as shown in
Figure 1a.
Figure 1c presents a cross-sectional transmittance electron microscopy (TEM) image of the Pt/Ga
2O
3/Pt device as shown in the inset of
Figure 1a. The device has a metal–semiconductor–metal (MSM) structure, consisting of a Pt bottom electrode on a c-plane sapphire substrate, a Ga
2O
3 layer that simultaneously enables resistive switching and capacitive switching, and a Pt top electrode.
Figure 1d shows a high-resolution TEM image of the Ga
2O
3 region in the structure, revealing a lack of regular atomic arrangement typical of crystalline thin films. Instead, a random, amorphous structure is observed, indicating that the sputter-grown Pt/Ga
2O
3/Pt thin films used in this study are entirely amorphous.
Figure 1e shows the (αhν)
2 of the Ga
2O
3 thin film as a function of photon energy for a sputter-grown Ga
2O
3 thin film. The absorption coefficient was calculated using the equation: αhν = B(hν − E
g)
1/2, where α is the absorption coefficient, h is the Plank’s constant (4.135 × 10
−15 eVs), ν is the frequency (s
−1), B is a constant, and E
g is the energy band gap (eV) [
28]. The optical bandgap of the Ga
2O
3 film, calculated to be 4.87 eV, was determined by extrapolating the linear portion of the absorption curve to the energy axis. This value is lower than the 4.9 eV bandgap of crystalline β-Ga
2O
3. Despite the amorphous nature of the Ga
2O
3 film, the presence of a distinct optical bandgap demonstrates its ability to absorb photons effectively. In addition, high absorption in the UV region suggests that the Ga
2O
3 thin film could be well-suited for use in UV-sensitive memristors and memcapacitors for optoelectronic synaptic devices. To identify defect-related deep levels within the bandgap, a plot of log(absorbance) versus photon wavelength is shown in the inset of
Figure 1e. The plot suggests the presence of deep levels in the Ga
2O
3 film that enable light absorption in the visible range, between 2.0 eV and 3.0 eV. The relatively high absorption in the UV range (3.0 to 3.5 eV) and the weaker absorption in the visible range (2.0 to 3.0 eV) indicate that these features are present in sputter-grown Ga
2O
3 films. Typically, absorption levels around 2.5 eV and 3.0 eV are associated with gallium vacancy (V
Ga)-related defects, while absorption around 3.5 eV is attributed to oxygen vacancy (V
O)-related defects [
29]. The bandgap of amorphous Ga
2O
3 thin films is reduced due to various crystal defects, allowing them to absorb light through shallow and deep levels [
30]. This enables the films to function as photosensitive devices capable of absorbing not only high-energy ultraviolet light but also lower-energy visible light.
Figure 2a,b show the photocurrent and photocapacitance of a Pt/Ga
2O
3/Pt optoelectronic synaptic device as a function of the applied voltage in the dark state and under illumination with light at wavelengths of 365, 450, 530, and 660 nm, respectively. Both graphs demonstrate a slight increase in photocurrent and photocapacitance. As the visible light wavelength decreases, a significant increase is observed when 365 nm UV light is applied.
Figure 2c illustrates the variation of the photocurrent and photocapacitance with increasing wavelength of light from 365 nm to 660 nm applied at 0.5 V. The dark current is 367 nA, which increases from 370 nA to 516 nA as the excitation wavelength decreases from 660 nm to 450 nm. A substantial rise in photocurrent to 2.29 μA is observed when 365 nm UV light is applied. It indicates that at lower energy levels, such as the 660 nm red light, fewer photoexcited carriers are formed, while at higher energy levels, such as the 365 nm UV light close to the bandgap, more photoexcited carriers can be generated. This is likely due to the high absorption in the UV region, as shown in
Figure 1e. Moreover, the dark capacitance at 0.5 V is 0.21 nF but increases from 0.22 nF to 0.26 nF as the excitation wavelength decreases from 660 nm to 450 m, and significantly increases to 0.34 nF with the application of 365 nm UV light. The photocapacitance of Pt/Ga
2O
3/Pt devices can be attributed to the generation and trapping of photoexcited carriers under illumination. This effect is much stronger under UV light due to the high energy that efficiently generates carriers across the bandgap of Ga
2O
3, whereas visible light causes smaller changes due to lower energy photon interactions, mainly associated with defects or sub-bandgap states. Therefore, it is believed that Ga
2O
3 can be effectively photoexcited by UV wavelength with high photon energy.
Figure 2d,e show the O 1s and Ga 3d spectra of Pt/Ga
2O
3/Pt optoelectronic synaptic device with HRS, respectively. The chemical composition of the Ga
2O
3 thin film was analyzed using XPS, focusing on the O 1s and Ga 3d peaks. The O 1s peak is divided into two components: the Ga–O peak at 531.7 eV, which corresponds to the binding energy of oxygen in the Ga
2O
3 lattice, and the V
o peak at 532.1 eV, which is associated with oxygen vacancies. The proportion of oxygen vacancies on the surface was determined by calculating the ratio of the V
o peak to the total area of the O 1s peak, which was found to be 23%. This indicates a significant presence of oxygen vacancy point defects in the amorphous Ga
2O
3 thin film. Such defects contribute to the formation of the amorphous structure, as opposed to the crystalline form of Ga
2O
3, and lead to enhanced conductivity and alterations in the bandgap. The inset of
Figure 2d shows the O 1s spectrum of the Pt/Ga
2O
3/Pt optoelectronic synaptic device in LRS. Analysis of the O 1s XPS spectra in the LRS revealed that the Ga-O peak accounted for 33.8%, while oxygen vacancies (V
o) contributed 66.2%. During the transition from HRS to LRS, the ratio of oxygen vacancies increased significantly from 23% to 66.2%, indicating that oxygen vacancies play a critical role in forming the conductive filament channel responsible for resistive switching. In addition, as shown in
Figure 2e, the Ga 3d peak consists of contributions from O 2s, Ga 3d (Ga
3+), and Ga 3d (Ga
1+). The Ga 3d peak can be decomposed into Ga
3+ and Ga
1+ peaks, corresponding to binding energies of 21.0 eV and 19.7 eV, respectively [
31]. The Ga
3+ state represents gallium in its fully oxidized form, which is typical in stoichiometric Ga
2O
3 and forms stable bonds with oxygen atoms in the crystal lattice. The Ga
+ state corresponds to gallium in a reduced oxidation state, such as the Ga
2O phases, indicating the presence of gallium with a lower oxidation state than Ga
3+. The Ga
3+ peak has an area 8.7 times larger than the Ga
+ peak, indicating that the amorphous gallium oxide is predominantly composed of Ga
2O
3. The presence of the Ga
+ peak suggests that oxygen vacancies or gallium interstitials are present, which can reduce the effective oxidation state of gallium in specific regions [
32]. Therefore, it is evident that gallium exists primarily in the fully oxidized Ga
3+ state, but also in a reduced Ga
+ state, likely due to the presence of oxygen vacancies or interstitial defects in the lattice. Moreover, the inset of
Figure 2e illustrates the Ga 3d peaks of Pt/Ga
2O
3/Pt optoelectronic synaptic device in the LRS. As the device transitions from HRS to LRS, the Ga
+ ratio increases from 19.1% to 21.9%, while the Ga
3+ ratio decreases from 89.9% to 78.1%. This indicates that Ga 3d analysis reflects an increase in oxygen vacancies during the transformation process from HRS and LRS, which is consistent with the O 1s results shown in
Figure 2d.
Figure 2f shows the shallow and deep levels corresponding to various defects within the Ga
2O
3 band gap, as well as the photocarrier excitation process as a function of the applied wavelength. It is well known that the donor levels, generated by oxygen vacancies in Ga
2O
3 thin films, are located at approximately 0.04 eV and 0.39 eV below the conduction band. In addition, acceptor levels formed by gallium vacancies and gallium-oxygen vacancies are positioned around 1.5 eV and 2.19 eV above the valence band [
33,
34]. Compared to the optical band gap of 4.87 eV for the Ga
2O
3 thin film, as shown in
Figure 1d, the energy corresponding to wavelengths from 365 nm to 660 nm (3.4 eV to 1.9 eV) is lower, which is insufficient to directly photoexcite Ga
2O
3 across its band gap. However, due to the presence of numerous shallow levels, carrier excitation is still possible with energies lower than the band gap of the Ga
2O
3 thin film. As a result, additional charge carriers can be generated not only at UV wavelengths but also at visible wavelengths, leading to an increase in both current and capacitance. When light is applied, holes at the valence band and acceptor level are excited at the donor levels and conduction band. This process generates electron–hole pairs, causing photocurrent to flow as the carriers move toward the Pt electrode. Therefore, the observed increase in current upon light exposure can be attributed to the increase in free carriers generated by these defective states. The increase in capacitance observed when light is applied can be attributed to the release of the trapped carriers. When light illuminates the Ga
2O
3 thin film, electrons trapped in defects such as oxygen vacancies are liberated. This process forms empty trap sites, which contribute to a reduction in the Schottky barrier height and an additional potential. The liberated carriers enhance the total amount of accumulated charge, leading to an increase in capacitance [
35]. It is believed that longer wavelengths of excitation light generate fewer photoexcited carriers due to their lower excitation energy. This is because higher photon energy, associated with shorter wavelengths, is more effective at promoting electrons from the valence band to the conduction band, thereby increasing the number of photoexcited carriers. As a result, the photocurrent and photocapacitance values of the Pt/Ga
2O
3/Pt optoelectronic synaptic device increase with the excitation light in the following order: red (660 nm), green (530 nm), blue (450 nm), and UV (365 nm), as shown in
Figure 2c.
Figure 3a,b illustrate the bipolar resistive and capacitive switching behaviors of the I−V and C−V characteristics in the Pt/Ga
2O
3/Pt optoelectronic synaptic device, both in darkness and under varying light wavelengths from 365 nm to 660 nm. The resistive switching mechanism operates in four voltage stages. First, as the voltage increases from 0 V to 8 V, conductive filament channels form in the Ga
2O
3 film, transitioning the device from a high-resistance state (HRS) to a low-resistance state (LRS) in the “set” phase. These filaments enable current conduction. When the voltage is reduced back to 0 V, the filaments remain intact, keeping the device in the LRS and preserving the low-resistance memory. In the next stage, as the voltage reverses from 0 V to −5 V, the conductive filaments break down, switching the device back to the HRS in the “reset” phase. As the voltage sweeps back from −5 V to 0 V, the device stays in the HRS without reforming the filaments, maintaining its HRS. During the HRS phases, the photocurrent shows a clear dependence on the wavelength of light, increasing as the wavelength shortens. This behavior, shown in
Figure 2a, emphasizes the optoelectronic characteristics of the synaptic device. For visible light wavelengths, ranging from red to blue, shorter wavelengths provide higher photon energy, which leads to an increase in photoexcited carriers. However, this increase is relatively modest, and the photocurrent remains significantly higher under UV light at 365 nm compared to visible light. This is because, as shown in
Figure 2f, visible light does not generate substantial excitation due to its limited penetration depth and its inability to effectively excite the deep-level states associated with oxygen vacancy defects in Ga
2O
3 film. In contrast, UV light penetrates deeper into the material, allowing it to excite these deep-level states, resulting in a much larger photocurrent. In the LRS, however, the photocurrent shows little sensitivity to the wavelength of the excitation light. This is because, in the LRS, the current is primarily conducted through the robust filament channels formed with the Ga
2O
3 thin film. The contribution of photoexcited carriers becomes negligible in comparison to the dominant carrier transport through these conductive filaments, which effectively mask any impact that the excitation light might have on the overall current.
Figure 3b shows the capacitive switching properties of the Pt/Ga
2O
3/Pt device through C-V sweeps, measured under various light wavelengths (365 nm to 660 nm) and in darkness. Under 365 nm UV light, the device exhibits the highest capacitance, especially during the set process (positive voltage region). The gradual increase in capacitance at lower voltages suggests that UV light generates more photoexcited carriers, increasing capacitance in the LRS. This is consistent with the results that UV light excites deeper levels, enhancing carrier density as shown in
Figure 2a. As the wavelength increases from 450 nm to 530 nm, capacitance decreases but still shows significant capacitive switching, indicating that shorter visible wavelengths can influence carrier generation, though less effectively than UV light. At 660 nm, capacitance is much lower, with a reduced response in both the set and reset regions, implying that longer wavelengths (closer to red) produce fewer photoexcited carriers, and thus less capacitive enhancement. The C-V measurement is less stable compared to resistive switching (RS) behavior in
Figure 3a, likely due to the inability to control high current compliance in the C-V measurement. Similar to the RS characteristics, the transition from HRS to LRS corresponds to increased capacitance. Oxygen vacancies in the Ga
2O
3 film are likely concentrated during conductive filament formation, increasing dipole carriers and capacitance. UV light further enhances this effect by generating more photoexcited carriers, which migrate around oxygen vacancies, amplifying capacitance in the LRS. Thus, as the excitation wavelength increases, capacitance in the LRS decreases.
Figure 4a,d show the photosynaptic time at two pulses of 1.0 s photoexcitation followed by 2.0 s darkness, plotted as excitatory postsynaptic current (EPSC
(I)) and excitatory postsynaptic capacitance (EPSC
(C)) as a function of wavelength. Paired-pulse facilitation (PPF), a measure of short-term plasticity in optoelectronic synaptic devices, quantifies the connection strength of a synapse by calculating the ratio of the second pulse (A
2) to the first pulse (A
1). This method confirmed short-term plasticity via red light excitation in the UV [
36,
37]. Both EPSC
(I) and EPSC
(C) exhibited higher optical excitation and slower decay at shorter wavelengths.
Figure 4b,e display the PPFs for varying time intervals (Δt) from 0.1 s to 30 s as a function of wavelength in EPSC
(I) and EPSC
(C), respectively. PPF decreased with increasing Δt across the entire wavelength range, aligning with the time dependence of PPF in photosynaptic devices and biological synapses. For both EPSC
(I) and EPSC
(C), PPF values increased with shorter excitation wavelengths. Specifically, as the wavelength decreased from 660 nm to 365 nm, PPF increased from 111% to 126% for EPSC
(I) and from 114% to 128% for EPSC
(C) at Δt = 20 s. This indicates enhanced short-term plasticity at shorter wavelengths, suggesting improvements in both short- and long-term memory characteristics.
Figure 4c compares the PPF values of EPSC
(I) and EPSC
(C) at a wavelength of 455 nm, confirming that EPSC
(C) exhibited a higher PPF value than EPSC
(I) across all Δt. In addition,
Figure 4f demonstrates that EPSC
(C) exhibits a higher PPF value than EPSC
(I) across all wavelength bands at Δt = 2.0 s. This indicates that EPSC
(C) has better short-term plasticity compared to EPSC
(I) across all wavelengths. The difference in PPF values is attributed to the decay mechanisms following LED stimulation in the Ga
2O
3 thin film. When light is applied to Pt/Ga
2O
3/Pt structure, photons excite electrons in the conduction and acceptor levels, forming electron–hole pairs and generating a photocurrent. Once the external stimulus is removed, the generated free carriers recombine, leading to a reduction of photocurrent. For capacitance, the generation of electron–hole pairs increases the movable effective charge density within the Ga
2O
3 film. Additionally, electrons trapped at the interface are released by the external stimulus, which increases the total charge. The relationship, C = Q/V (Q is charge and V is voltage), indicates that capacitance increases with accumulated charge. After the external stimulus is removed, the released carriers are re-trapped by defects, leading to a decrease in capacitance due to the reduction in additional carriers. The higher PPF value of EPSC
(C) compared to EPSC
(I) is due to the distinct behaviors of charge carriers. Rapid recombination in EPSC
(I) leads to a swift decline, as it is sensitive to immediate carrier availability. In contrast, capacitance can store charge more effectively, with some carriers becoming trapped in defect states [
38]. This prevents immediate recombination and results in a slower decay of capacitance, allowing it to maintain higher levels over time. Thus, capacitance demonstrates a more robust long-term memory effect, enhancing its overall characteristics.
In
Figure 5a–h, the effects of wavelength energy on EPSC
(I) and EPSC
(C) are presented. The photosimulation conditions were evaluated based on duration, light intensity, frequency, and the number of exposures. In the Ga
2O
3 optoelectronic synapse device, a duration of 3.0 s, light intensity of 336 µW/cm
2, frequency of 200 mHz, and exposure cycles of 20 indicate that optical potentiation effectively responds to decreasing wavelengths. During the application of light of 3.0 s, the wavelength decreased from 660 nm to 365 nm, resulting in an increase in EPSC
(I) from 5.4 nA to 146 nA and an increase in EPSC
(C) from 3.9 pF to 69.3 pF. At 30 s after stopping LED exposure, EPSC
(I) changed from 0.9 nA to 56.8 nA, while EPSC
(C) changed from 1.1 nF to 28 nF. These results confirm that higher energy wavelengths retain greater EPSC
(I) and EPSC
(C) characteristics even after optical excitation ceases. Therefore, integrating these properties into neuromorphic computing systems is advantageous with shorter wavelengths providing better long-term memory (LTM) characteristics through optical stimulation and output [
39,
40]. Additionally, a single Pt/Ga
2O
3/Pt device demonstrates four distinct photoexcited long-term memory states corresponding to the applied wavelength. By diversifying the photon conditions for each wavelength band, it becomes possible to adjust the levels expressed in synapses exponentially, expanding the diversity of information storage and enhancing the efficiency and performance of synaptic devices.
Figure 6a,c present the learning-experience simulation results of EPSC
(I) and EPSC
(C) for wavelength dependence photoexcitation in a Pt/Ga
2O
3/Pt optoelectronic synaptic device. Optical potentiation was achieved by applying 100 pulse cycles (0.5 s pulse width, 50% duty cycle) across four wavelength bands, from UV to red, to obtain the maximum EPSC
(I) and EPSC
(C). A threshold of 70% of the maximum EPSC
(I) and EPSC
(C) was set for learning and forgetting. The number of pulses required for the first learning cycle of EPSC
(I) across all wavelengths was approximately 60 pulses, while the second learning cycle required significantly fewer pulses, around 18 pulses. Although the pulse count varied slightly with wavelength, it remained consistent as the increase from 70% to the maximum value followed a similar pattern. The second learning cycle required fewer pulses, indicating that the number of pulses needed to reach the desired EPSC
(I) and EPSC
(C) decreased with repeated training. As the wavelength decreased from 660 nm to 365 nm, the time for 70% forgetting increased from 5.0 s to 39 s for EPSC
(I) and from 18 s to 133 s for EPSC
(C). This suggests that learning is less effective, and retention is shorter at longer wavelengths (red light) compared to shorter wavelengths (UV light). Notably, at 660 nm, EPSC
(I) declined to 70% within just 5.0 s after the first optical learning, indicating rapid forgetting at longer wavelengths. In contrast, with 365 nm UV stimuli, it took 39 s for the EPSC
(I) to decline after the first learning process, but after the second learning process, the EPSC
(I) remained at 72% of its peak after the same 39 s, about 2.0% higher than after the first learning. This indicates that memory retention improved with the second learning compared to primary learning. Simulation of learning using EPSC
(C) also showed that both the maximum EPSC
(C) and the number of pulses required to reach it during the first learning cycle decreased as the wavelength increased. This indicates that as the wavelength increases, light energy decreases, resulting in a slower rate of EPSC
(C) increase and faster learning at longer wavelengths. In the forgetting process following photosimulation, UV light led to a 70% reduction in EPSC
(C) after 133 s, while 660 nm red light exhibited forgetting after just 18 s. This shows that UV light, with its higher energy, leads to slower forgetting compared to red light. In the second forgetting process, red light led to an EPSC
(C) retention of 70.5% after 18 s, while 365 nm UV light resulted in a higher retention of 84.7% after 133 s. This suggests that repeated learning improves retention across all wavelengths, from UV to red. However, while learning occurs faster under low-energy, long-wavelength light, forgetting characteristics are better at shorter, high-energy wavelengths. This slower forgetting rate is attributed to the re-trapping of photoexcited carriers at defect levels within the Ga
2O
3 material, which delays their recombination. This suggests that EPSC
(C), compared to EPSC
(I), is more suitable for LTM applications, as it allows memory to last longer without easily fading.
Figure 6b,d present a simulated visual layout of a 3 × 3 pixel array, representing two iterations of learning using EPSC
(I) and EPSC
(C) values under UV, blue, green, and red light stimulation. Two devices from a selection of nine on a wafer were tested, with the EPSC
(I) and EPSC
(C) values from pulse inputs encoding the pixel color contrast, as shown in the scale bar on the right. The intensity of the pixel colors reflects the values defined in
Figure 6a,c.
Figure 6b show that after the first training with varying wavelengths, memory decays faster with red light, where the photostimulus memory fades after 6.0 s. Longer wavelengths exhibited slower memory decay, as indicated by darker colors, suggesting better learning retention. In contrast, the second learning process, EPSC
(I) and EPSC
(C) decayed more slowly, resulting in darker images after the same period, as shown in
Figure 6b,d. This trend was observed for both EPSC
(C) and EPSC
(I), indicating that higher-energy 365 nm UV light produces better learning memory properties, potentially enhancing the LTM characteristics of optoelectronic synaptic devices. Furthermore, EPSC
(C) demonstrated superior memory retention, maintaining learning properties for up to 18 s, more than double the forgetting time of EPSC
(I), which was 8.0 s.