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Volume 14
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10.3390/nano14080725
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Article

Structural and Morphological Studies of Pt in the As-Grown and Encapsulated States and Dependency on Film Thickness

by
Berkin Nergis
1,
Sondes Bauer
1,*,
Xiaowei Jin
2,
Lukas Horak
3,
Reinhard Schneider
2,
Vaclav Holy
3,
Klaus Seemann
4,
Sven Ulrich
4 and
Tilo Baumbach
1,5
1
Institute for Photon Science and Synchrotron Radiation, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
2
Laboratory for Electron Microscopy, Karlsruhe Institute of Technology, Engesserstr. 7, 76131 Karlsruhe, Germany
3
Department of Condensed Matter Physics, Charles University, Ke Karlovu 5, 121 16 Prague, Czech Republic
4
Institute for Applied Materials, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
5
Laboratory for Applications of Synchrotron Radiation, Karlsruhe Institute of Technology, Kaiserstr. 12, 76131 Karlsruhe, Germany
*
Author to whom correspondence should be addressed.
Nanomaterials 2024, 14(8), 725; https://doi.org/10.3390/nano14080725
Submission received: 12 March 2024 / Revised: 16 April 2024 / Accepted: 17 April 2024 / Published: 20 April 2024
(This article belongs to the Topic Laser Processing of Metallic Materials)
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Abstract

The morphology and crystal structure of Pt films grown by pulsed laser deposition (PLD) on yttria-stabilized zirconia (YSZ)at high temperatures Tg = 900 °C was studied for four different film thicknesses varying between 10 and 70 nm. During the subsequent growth of the capping layer, the thermal stability of the Pt was strongly influenced by the Pt film’s thickness. Furthermore, these later affected the film morphology, the crystal structure and hillocks size, and distribution during subsequent growth at Tg = 900 °C for a long duration. The modifications in the morphology as well as in the structure of the Pt film without a capping layer, named also as the as-grown and encapsulated layers in the bilayer system, were examined by a combination of microscopic and scattering methods. The increase in the thickness of the deposited Pt film brought three competitive phenomena into occurrence, such as 3D–2D morphological transition, dewetting, and hillock formation. The degree of coverage, film continuity, and the crystal quality of the Pt film were significantly improved by increasing the deposition time. An optimum Pt film thickness of 70 nm was found to be suitable for obtaining a hillock-free Pt bottom electrode which also withstood the dewetting phenomena revealed during the subsequent growth of capping layers. This achievement is crucial for the deposition of functional bottom electrodes in ferroelectric and multiferroic heterostructure systems.
Keywords: platinum; bottom electrode; PLD; hillock formation; dewetting; encapsulated platinum; X-ray diffraction; atomic force microscopy; electron microscopy platinum; bottom electrode; PLD; hillock formation; dewetting; encapsulated platinum; X-ray diffraction; atomic force microscopy; electron microscopy

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MDPI and ACS Style

Nergis, B.; Bauer, S.; Jin, X.; Horak, L.; Schneider, R.; Holy, V.; Seemann, K.; Ulrich, S.; Baumbach, T. Structural and Morphological Studies of Pt in the As-Grown and Encapsulated States and Dependency on Film Thickness. Nanomaterials 2024, 14, 725. https://doi.org/10.3390/nano14080725

AMA Style

Nergis B, Bauer S, Jin X, Horak L, Schneider R, Holy V, Seemann K, Ulrich S, Baumbach T. Structural and Morphological Studies of Pt in the As-Grown and Encapsulated States and Dependency on Film Thickness. Nanomaterials. 2024; 14(8):725. https://doi.org/10.3390/nano14080725

Chicago/Turabian Style

Nergis, Berkin, Sondes Bauer, Xiaowei Jin, Lukas Horak, Reinhard Schneider, Vaclav Holy, Klaus Seemann, Sven Ulrich, and Tilo Baumbach. 2024. "Structural and Morphological Studies of Pt in the As-Grown and Encapsulated States and Dependency on Film Thickness" Nanomaterials 14, no. 8: 725. https://doi.org/10.3390/nano14080725

APA Style

Nergis, B., Bauer, S., Jin, X., Horak, L., Schneider, R., Holy, V., Seemann, K., Ulrich, S., & Baumbach, T. (2024). Structural and Morphological Studies of Pt in the As-Grown and Encapsulated States and Dependency on Film Thickness. Nanomaterials, 14(8), 725. https://doi.org/10.3390/nano14080725

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