Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
4. Conclusions and Further Work
Author Contributions
Funding
Conflicts of Interest
References
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Group | The Thickness of the ITO Contact Layer | Annealing Temperature of the ITO Contact Layer | The Thickness of the Ag Metal Layer | Annealing Temperature of the Whole ITO/Ga2O3 (15 nm)/Ag/Ga2O3 (15 nm) Multilayer |
---|---|---|---|---|
1 | 12 nm | 500 °C | 10.5 nm | 600 °C |
550 °C | ||||
600 °C | ||||
2 | 500 °C | 14 nm | ||
550 °C | ||||
600 °C | ||||
3 | 500 °C | 17.5 nm | ||
550 °C | ||||
600 °C | ||||
4 | 500 °C | 21 nm | ||
550 °C | ||||
600 °C |
Group | The Thickness of the ITO Contact Layer | Annealing Temperature of the ITO Contact Layer | The Thickness of the Ag Metal Layer | Annealing Temperature of the Whole ITO/Ga2O3 (15 nm)/Ag/Ga2O3 (15 nm) Multilayer |
---|---|---|---|---|
1 | 6 nm | 550 °C | 17.5 nm | 600 °C |
2 | 12 nm | |||
3 | 18 nm | |||
4 | 24 nm |
Group | The Thickness Of the ITO Contact Layer | Annealing Temperature of the ITO Contact Layer | The Thickness of the Ag Metal Layer | Annealing Temperature of the Whole ITO/Ga2O3 (15 nm)/Ag/Ga2O3 (15 nm) Multilayer |
---|---|---|---|---|
1 | 12 nm | 550 °C | 17.5 nm | As-deposited |
2 | 550 °C | |||
3 | 600 °C | |||
4 | 650 °C |
Sample | Transmittance at 335 nm | Sheet Resistance | Specific Contact Resistances |
---|---|---|---|
60-nm ITO | 78.7% | 51.55 Ω/sq | 2.96×10−3 Ω·cm2 |
ITO/Ga2O3/Ag/Ga2O3 | 86.4% | 3.43 Ω/sq | 1.45×10−3 Ω·cm2 |
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Liang, S.; Zhou, Q.; Li, X.; Zhong, M.; Wang, H. Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes. Nanomaterials 2019, 9, 403. https://doi.org/10.3390/nano9030403
Liang S, Zhou Q, Li X, Zhong M, Wang H. Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes. Nanomaterials. 2019; 9(3):403. https://doi.org/10.3390/nano9030403
Chicago/Turabian StyleLiang, Siwei, Quanbin Zhou, Xianhui Li, Ming Zhong, and Hong Wang. 2019. "Electrical and Optical Properties of a Transparent Conductive ITO/Ga2O3/Ag/Ga2O3 Multilayer for Ultraviolet Light-Emitting Diodes" Nanomaterials 9, no. 3: 403. https://doi.org/10.3390/nano9030403