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Photonics
Volume 10
Issue 2
10.3390/photonics10020168
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Article
Peer-Review Record

Distortion Detection of Lithographic Projection Lenses Based on Wavefront Measurement

Photonics 2023, 10(2), 168; https://doi.org/10.3390/photonics10020168
by Tian Li 1,2, Jian Wang 1,3, Shaolin Zhou 2, Haiyang Quan 1,*, Lei Chen 1, Junbo Liu 1, Jing Du 1, Xianchang Zhu 1,3 and Song Hu 1,3
Reviewer 1: Anonymous
Reviewer 2:
Bin Wang
Reviewer 3: Anonymous
Photonics 2023, 10(2), 168; https://doi.org/10.3390/photonics10020168
Submission received: 9 November 2022 / Revised: 29 January 2023 / Accepted: 30 January 2023 / Published: 4 February 2023
(This article belongs to the Special Issue Optical Measurement Systems)

Round 1

Reviewer 1 Report

Please see attached file for edits. Authors did a good job of writing a clear, easy to understand paper. However, references need a lot of work. Most references are missing - making it impossible to check if the authors are citing papers appropriately. 

Comments for author File: Comments.pdf

Author Response

Thank you for giving me the opportunity to submit revised draft of my manuscript titled “Distortion detection of lithographic projection lenses based on wavefront measurement, photonics-2055070.” We appreciate the time and effort that you have dedicated to providing your valuable feedback on our manuscript.

We have responded to your valuable comments and made corrections to the manuscript in the appropriate places.

Author Response File: Author Response.docx

Reviewer 2 Report


Comments for author File: Comments.pdf

Author Response

Thank you for giving me the opportunity to submit revised draft of my manuscript titled “Distortion detection of lithographic projection lenses based on wavefront measurement, photonics-2055070.” We appreciate the time and effort that you have dedicated to providing your valuable feedback on our manuscript.

We have responded to your valuable comments and made corrections to the manuscript in the appropriate places.

Author Response File: Author Response.docx

Reviewer 3 Report

The section's model is impossible to follow, the isn't a proper validation and presentation of the model, for example, the figure 1 is placed 6 times, among many other details that do not allow to read and even less to understand this paper.

Author Response

Thank you for giving me the opportunity to submit revised draft of my manuscript titled “Distortion detection of lithographic projection lenses based on wavefront measurement, photonics-2055070.” We appreciate the time and effort that you have dedicated to providing your valuable feedback on our manuscript.

We have responded to your valuable comments and made corrections to the manuscript in the appropriate places.

Author Response File: Author Response.docx

Round 2

Reviewer 3 Report

I think is necessary do a revision for improve the final version.

Author Response

Please see the attachment

 

Author Response File: Author Response.docx

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