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Journal: Photonics, 2023
Volume: 10
Number: 638

Article: The Inverse Optimization of Lithographic Source and Mask via GA-APSO Hybrid Algorithm
Authors: by Junbo Liu, Ji Zhou, Haifeng Sun, Chuan Jin, Jian Wang and Song Hu
Link: https://www.mdpi.com/2304-6732/10/6/638

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