Low Loss Electro-Optic Polymer Based Fast Adaptive Phase Shifters Realized in Silicon Nitride and Oxynitride Waveguide Technology
Abstract
:1. Introduction
2. Design Solutions for Minimal Losses in SiON/SiN—EO Polymer Phase Shifters
2.1. Material Absorption
2.2. Scattering Losses
2.3. Poling Induced Losses
2.4. Fiber-Chip Coupling Losses
3. Proof of concept Prototype
3.1. Fabrication Process
3.2. Measurement Procedure
3.3. Measurement Results and Discussion
4. Optimization of the Phase Shifter Design
4.1. Simulation Set-up
4.2. Simulation Results and Discussion
5. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
Abbreviations
EO | electro-optic |
CMOS | complementary metal-oxide-semiconductor |
SiON | silicon oxynitride |
SiN | silicon nitride |
FOM | figure of merit |
PECVD | plasma-enhanced chemical vapor deposition |
LPCVD | low-pressure chemical vapor deposition |
PMMA | poly(methyl methacrylate) |
CMP | chemical mechanical polishing |
RMS | root mean square |
MFD | mode field diameter |
SSMF | standard single mode fiber |
HNAF | high numerical aperture fiber |
MZI | Mach-Zehnder interferometer |
RIE | reactive ion etching |
SEM | scanning electron microscope |
References
- Bohn, M.; Rosenkranz, W.; Krummrich, P. Adaptive distortion compensation with integrated optical finite impulse response filters in high bitrate optical communication systems. IEEE J. Sel. Top. Quantum Electron. 2004, 10, 273–280. [Google Scholar] [CrossRef]
- Doerr, C.; Fontaine, N.; Buhl, L. PDM-DQPSK Silicon Receiver with Integrated Monitor and Minimum Number of Controls. IEEE Photonics Technol. Lett. 2012, 24, 697–699. [Google Scholar] [CrossRef]
- Krummrich, P.; Kotten, K. Extremely fast (microsecond timescale) polarization changes in high speed long haul WDM transmission systems. In Proceedings of the Optical Fiber Communication Conference, Los Angeles, CA, USA, 23–27 February 2014; Volume 2, p. 3.
- Krummrich, P.M.; Ronnenberg, D.; Schairer, W.; Wienold, D.; Jenau, F.; Herrmann, M. Demanding response time requirements on coherent receivers due to fast polarization rotations caused by lightning events. Opt. Express 2016, 24, 12442–12457. [Google Scholar] [CrossRef] [PubMed]
- Luo, J.; Jen, A.Y. Highly Efficient Organic Electrooptic Materials and Their Hybrid Systems for Advanced Photonic Devices. IEEE J. Sel. Top. Quantum Electron. 2013, 19, 42–53. [Google Scholar] [CrossRef]
- Korn, D.; Jazbinsek, M.; Palmer, R.; Baier, M.; Alloatti, L.; Yu, H.; Bogaerts, W.; Lepage, G.; Verheyen, P.; Absil, P.; et al. Electro-Optic Organic Crystal Silicon High-Speed Modulator. IEEE Photonics J. 2014, 6, 1–9. [Google Scholar] [CrossRef]
- Palmer, R.; Koeber, S.; Elder, D.; Woessner, M.; Heni, W.; Korn, D.; Lauermann, M.; Bogaerts, W.; Dalton, L.; Freude, W.; et al. High-Speed, Low Drive-Voltage Silicon-Organic Hybrid Modulator Based on a Binary-Chromophore Electro-Optic Material. J. Lightwave Technol. 2014, 32, 2726–2734. [Google Scholar] [CrossRef] [Green Version]
- Kim, S.K.; Zhang, H.; Chang, D.; Zhang, C.; Wang, C.; Steier, W.; Fetterman, H. Electrooptic polymer modulators with an inverted-rib waveguide structure. IEEE Photonics Technol. Lett. 2003, 15, 218–220. [Google Scholar]
- Heckman, E.M.; Aga, R.S.; Rossbach, A.T.; Telek, B.A.; Bartsch, C.M.; Grote, J.G. DNA biopolymer conductive cladding for polymer electro-optic waveguide modulators. Appl. Phys. Lett. 2011, 98. [Google Scholar] [CrossRef]
- DeRose, C.T.; Himmelhuber, R.; Mathine, D.; Norwood, R.A.; Luo, J.; Jen, A.K.Y.; Peyghambarian, N. High Δn strip-loaded electro-optic polymer waveguide modulator with low insertion loss. Opt. Express 2009, 17, 3316–3321. [Google Scholar] [CrossRef] [PubMed]
- Zhang, X.; Hosseini, A.; Lin, C.Y.; Luo, J.; Jen, A.Y.; Chen, R. Demonstration of effective in-device r33 over 1000 pm/V in electro-optic polymer refilled silicon slot photonic crystal waveguide modulator. In Proceedings of the Conference on Laser and Electro-Optics Event (CLEO), San Jose, CA, USA, 9–14 June 2013; pp. 1–2.
- Melikyan, A.; Koehnle, K.; Lauermann, M.; Palmer, R.; Koeber, S.; Muehlbrandt, S.; Schindler, P.C.; Elder, D.L.; Wolf, S.; Heni, W.; et al. Plasmonic-organic hybrid (POH) modulators for OOK and BPSK signaling at 40 Gbit/s. Opt. Express 2015, 23, 9938–9946. [Google Scholar] [CrossRef] [PubMed]
- Himmelhuber, R.; Herrera, O.; Voorakaranam, R.; Li, L.; Jones, A.; Norwood, R.; Luo, J.; Jen, A.Y.; Peyghambarian, N. A Silicon-Polymer Hybrid Modulator —Design, Simulation and Proof of Principle. J. Lightwave Technol. 2013, 31, 4067–4072. [Google Scholar] [CrossRef]
- Qiu, F.; Spring, A.M.; Maeda, D.; Ozawa, M.a.; Odoi, K.; Aoki, I.; Otomo, A.; Yokoyama, S. A straightforward electro-optic polymer covered titanium dioxide strip line modulator with a low driving voltage. Appl. Phys. Lett. 2014, 105. [Google Scholar] [CrossRef]
- Bauters, J.F.; Heck, M.J.R.; John, D.D.; Barton, J.S.; Bruinink, C.M.; Leinse, A.; Heideman, R.G.; Blumenthal, D.J.; Bowers, J.E. Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding. Opt. Express 2011, 19, 24090–24101. [Google Scholar] [CrossRef] [PubMed]
- Block, B.A.; Younkin, T.R.; Davids, P.S.; Reshotko, M.R.; Chang, P.; Polishak, B.M.; Huang, S.; Luo, J.; Jen, A.K.Y. Electro-optic polymer cladding ring resonator modulators. Opt. Express 2008, 16, 18326–18333. [Google Scholar] [CrossRef] [PubMed]
- Block, B.; Liff, S.; Kobrinsky, M.; Reshotko, M.; Tseng, R.; Ban, I.; Chang, P. A low power electro-optic polymer clad Mach-Zehnder modulator for high speed optical interconnects. Proc. SPIE Silicon Photonics 2013, 8629. [Google Scholar] [CrossRef]
- Fadel, M.; Bulters, M.; Niemand, M.; Voges, E.; Krummrich, P. Low-Loss and Low-Birefringence High-Contrast Silicon-Oxynitride Waveguides for Optical Communication. J. Lightwave Technol. 2009, 27, 698–705. [Google Scholar] [CrossRef]
- Albers, H.; Hilderink, L.; Szilagyi, E.; Paszti, F.; Lambeck, P.; Popma, T. Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. In Proceedings of the 8th Annual Meeting Conference on Lasers and Electro-Optics Society Annual Meeting, San Francisco, CA, USA, 30 October–2 November 1995; pp. 88–89.
- Johnson, F.G.; King, O.S.; Hryniewicz, J.V.; Joneckis, L.G.; Chu, S.T.; Gill, D.M. Use of Deuterated Gases for the Vapor Deposition of Thin Films for Low-Loss Optical Devices and Waveguides. U.S. Patent 6,771,868 B2, 2004. [Google Scholar]
- DeRose, C. Electro-Optic Polymers: Materials and Devices; University of Arizona: Tucson, AZ, USA, 2009. [Google Scholar]
- Barwicz, T.; Haus, H. Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides. J. Lightwave Technol. 2005, 23, 2719–2732. [Google Scholar] [CrossRef]
- Jang, J.H.; Zhao, W.; Bae, J.W.; Selvanathan, D.; Rommel, S.L.; Adesida, I.; Lepore, A.; Kwakernaak, M.; Abeles, J.H. Direct measurement of nanoscale sidewall roughness of optical waveguides using an atomic force microscope. Appl. Phys. Lett. 2003, 83, 4116–4118. [Google Scholar] [CrossRef]
- De Ridder, R.M.; Driessen, A.; Rikkers, E.; Lambeck, P.V.; Diemeer, M.B. Design and fabrication of electro-optic polymer modulators and switches. Opt. Mater. 1999, 12, 205–214. [Google Scholar] [CrossRef]
- Teng, C.C.; Mortazavi, M.A.; Boudoughian, G.K. Origin of the poling-induced optical loss in a nonlinear optical polymeric waveguide. Appl. Phys. Lett. 1995, 66, 667–669. [Google Scholar] [CrossRef]
- Chen, H.; Chen, B.; Huang, D.; Jin, D.; Luo, J.D.; Jen, A.K.Y.; Dinu, R. Broadband electro-optic polymer modulators with high electro-optic activity and low poling induced optical loss. Appl. Phys. Lett. 2008, 93. [Google Scholar] [CrossRef]
- Huang, S.; Kim, T.D.; Luo, J.; Hau, S.K.; Shi, Z.; Zhou, X.H.; Yip, H.L.; Jen, A.K.Y. Highly efficient electro-optic polymers through improved poling using a thin TiO2-modified transparent electrode. Appl. Phys. Lett. 2010, 96. [Google Scholar] [CrossRef]
- Taillaert, D.; Laere, F.V.; Ayre, M.; Bogaerts, W.; Thourhout, D.V.; Bienstman, P.; Baets, R. Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides. Jpn. J. Appl. Phys. 2006, 45, 6071. [Google Scholar] [CrossRef]
- Edwards, C.; Presby, H.M.; Dragone, C. Ideal microlenses for laser to fiber coupling. J. Lightwave Technol. 1993, 11, 252–257. [Google Scholar] [CrossRef]
- Chen, L.; Doerr, C.; Chen, Y.K.; Liow, T.Y. Low-Loss and Broadband Cantilever Couplers Between Standard Cleaved Fibers and High-Index-Contrast Si3N4 or Si Waveguides. IEEE Photonics Technol. Lett. 2010, 22, 1744–1746. [Google Scholar] [CrossRef]
- Shoji, T.; Tsuchizawa, T.; Watanabe, T.; Yamada, K.; Morita, H. Spot-size converter for low-loss coupling between 0.3 μm-square Si wire waveguides and single-mode fibers. In Proceedings of the 15th IEEE Annual Meeting of the Lasers and Electro-Optics Society, Glasgow, UK, 10–14 November 2002; pp. 289–290.
- Hoffmann, M.; Kopka, P.; Voges, E. Low-loss fiber-matched low-temperature PECVD waveguides with small-core dimensions for optical communication systems. IEEE Photonics Technol. Lett. 1997, 9, 1238–1240. [Google Scholar] [CrossRef]
- Singer, K.D.; Holland, W.R.; Kuzyk, M.G.; Wolk, G.L.; Cahill, P.A. Guest-Host Polymers for Nonlinear Optics. Mol. Cryst. Liq. Cryst. Inc. Nonlinear Opt. 1990, 189, 123–136. [Google Scholar] [CrossRef]
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Baudzus, L.; Krummrich, P.M. Low Loss Electro-Optic Polymer Based Fast Adaptive Phase Shifters Realized in Silicon Nitride and Oxynitride Waveguide Technology. Photonics 2016, 3, 49. https://doi.org/10.3390/photonics3030049
Baudzus L, Krummrich PM. Low Loss Electro-Optic Polymer Based Fast Adaptive Phase Shifters Realized in Silicon Nitride and Oxynitride Waveguide Technology. Photonics. 2016; 3(3):49. https://doi.org/10.3390/photonics3030049
Chicago/Turabian StyleBaudzus, Lars, and Peter M. Krummrich. 2016. "Low Loss Electro-Optic Polymer Based Fast Adaptive Phase Shifters Realized in Silicon Nitride and Oxynitride Waveguide Technology" Photonics 3, no. 3: 49. https://doi.org/10.3390/photonics3030049