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Journal: Electron. Mater., 2023
Volume: 4
Number: 9
Article:
Effect of the RF Power of PECVD on the Crystalline Fractions of Microcrystalline Silicon (μc-Si:H) Films and Their Structural, Optical, and Electronic Properties
Authors:
by
Mario Moreno, Arturo Torres-Sánchez, Pedro Rosales, Alfredo Morales, Alfonso Torres, Javier Flores, Luis Hernández, Carlos Zúñiga, Carlos Ascencio and Alba Arenas
Link:
https://www.mdpi.com/2673-3978/4/3/9
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