Behl, C.; Behlert, R.; Seiler, J.; Helke, C.; Shaporin, A.; Hiller, K.
Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications. Micro 2024, 4, 142-156.
https://doi.org/10.3390/micro4010010
AMA Style
Behl C, Behlert R, Seiler J, Helke C, Shaporin A, Hiller K.
Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications. Micro. 2024; 4(1):142-156.
https://doi.org/10.3390/micro4010010
Chicago/Turabian Style
Behl, Christian, Regine Behlert, Jan Seiler, Christian Helke, Alexey Shaporin, and Karla Hiller.
2024. "Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications" Micro 4, no. 1: 142-156.
https://doi.org/10.3390/micro4010010
APA Style
Behl, C., Behlert, R., Seiler, J., Helke, C., Shaporin, A., & Hiller, K.
(2024). Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications. Micro, 4(1), 142-156.
https://doi.org/10.3390/micro4010010