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Keywords = MHz burst Bessel beam

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11 pages, 4247 KB  
Article
Rapid Fabrication of Large-Area Anti-Reflective Microholes Using MHz Burst Mode Femtosecond Laser Bessel Beams
by Yulong Ding, Cong Wang, Zheng Gao, Xiang Jiang, Shiyu Wang, Xianshi Jia, Linpeng Liu and Ji’an Duan
Nanomaterials 2025, 15(22), 1726; https://doi.org/10.3390/nano15221726 - 15 Nov 2025
Viewed by 1034
Abstract
Femtosecond laser has been widely utilized in functional microstructural surfaces for applications such as anti-reflection, radiative cooling, and self-cleaning. However, achieving high-efficiency manufacturing of high-consistency functional microstructures (with feature sizes ~1 μm) over large areas remains a challenge. Here, we report a femtosecond [...] Read more.
Femtosecond laser has been widely utilized in functional microstructural surfaces for applications such as anti-reflection, radiative cooling, and self-cleaning. However, achieving high-efficiency manufacturing of high-consistency functional microstructures (with feature sizes ~1 μm) over large areas remains a challenge. Here, we report a femtosecond laser temporal and spatial modulation technique for fabricating large-area anti-reflective microholes on magnesium fluoride (MgF2) windows. The beam was transformed into a Bessel beam to extend the Rayleigh length, enabling the fabrication of microhole arrays with sub-micron precision and surface roughness variations within 10 nm over a 6 μm focal position shift range (5–11 μm). By modulating MHz burst pulses, the aspect ratio of the microholes was increased from 0.3 to 0.7 without compromising a processing speed of 10,000 holes per second. As a proof of concept, large-area anti-reflective microholes were fabricated on a 20 mm × 20 mm surface of the MgF2 window, forming a nanoscale refractive index gradient layer and achieving a transmittance increase to over 98%. This method provides a feasible solution for the efficient and high-consistency manufacturing of functional microstructures over large areas. Full article
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13 pages, 8119 KB  
Article
Bessel Beam Femtosecond Laser Interaction with Fused Silica Before and After Chemical Etching: Comparison of Single Pulse, MHz-Burst, and GHz-Burst
by Théo Guilberteau, Pierre Balage, Manon Lafargue, John Lopez, Laura Gemini and Inka Manek-Hönninger
Micromachines 2024, 15(11), 1313; https://doi.org/10.3390/mi15111313 - 29 Oct 2024
Cited by 7 | Viewed by 3997
Abstract
We investigate the elongated modifications resulting from a Bessel beam-shaped femtosecond laser in fused silica under three different operation modes, i.e., the single-pulse, MHz-burst, and GHz-burst regimes. The single-pulse and MHz-burst regimes show rather similar behavior in glass, featuring elongated and slightly tapered [...] Read more.
We investigate the elongated modifications resulting from a Bessel beam-shaped femtosecond laser in fused silica under three different operation modes, i.e., the single-pulse, MHz-burst, and GHz-burst regimes. The single-pulse and MHz-burst regimes show rather similar behavior in glass, featuring elongated and slightly tapered modifications. Subsequent etching with Potassium Hydroxide exhibits an etching rate and selectivity of up to 606 μm/h and 2103:1 in single-pulse operation and up to 322 μm/h and 2230:1 in the MHz-burst regime, respectively. Interestingly, in the GHz-burst mode, modification by a single burst of 50 pulses forms a taper-free hole without any etching. This constitutes a significant result paving the way for chemical-free, on-the-fly drilling of high aspect-ratio holes in glass. Full article
(This article belongs to the Special Issue The 15th Anniversary of Micromachines)
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15 pages, 5344 KB  
Article
Bessel Beam Dielectrics Cutting with Femtosecond Laser in GHz-Burst Mode
by Pierre Balage, Théo Guilberteau, Manon Lafargue, Guillaume Bonamis, Clemens Hönninger, John Lopez and Inka Manek-Hönninger
Micromachines 2023, 14(9), 1650; https://doi.org/10.3390/mi14091650 - 22 Aug 2023
Cited by 11 | Viewed by 5089
Abstract
We report, for the first time to the best of our knowledge, Bessel beam dielectrics cutting with a femtosecond laser in GHz-burst mode. The non-diffractive beam shaping is based on the use of an axicon and allows for cutting glasses up to 1 [...] Read more.
We report, for the first time to the best of our knowledge, Bessel beam dielectrics cutting with a femtosecond laser in GHz-burst mode. The non-diffractive beam shaping is based on the use of an axicon and allows for cutting glasses up to 1 mm thickness with an excellent cutting quality. Moreover, we present a comparison of the cutting results with the state-of-the-art method, consisting of short MHz-bursts of femtosecond pulses. We further illustrate the influence of the laser beam parameters such as the burst energy and the pitch between consecutive Bessel beams on the machining quality of the cutting plane and provide process windows for both regimes. Full article
(This article belongs to the Special Issue Laser Micro/Nano Fabrication)
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11 pages, 2439 KB  
Article
Rapid Fabrication of Wavelength-Scale Micropores on Metal by Femtosecond MHz Burst Bessel Beam Ablation
by Yang Cheng, Yu Lu, Qing Yang, Jun Zhong, Mengchen Xu, Xiaodan Gou, Lin Kai, Xun Hou and Feng Chen
Nanomaterials 2022, 12(24), 4378; https://doi.org/10.3390/nano12244378 - 8 Dec 2022
Cited by 4 | Viewed by 2219
Abstract
The preparation of the wavelength-scale micropores on metallic surfaces is limited by the high opacity of metal. At present, most micropores reported in the literature are more than 20 µm in diameter, which is not only large in size, but renders them inefficient [...] Read more.
The preparation of the wavelength-scale micropores on metallic surfaces is limited by the high opacity of metal. At present, most micropores reported in the literature are more than 20 µm in diameter, which is not only large in size, but renders them inefficient for processing so that it is difficult to meet the needs of some special fields, such as aerospace, biotechnology, and so on. In this paper, the rapid laser fabrications of the wavelength-scale micropores on various metallic surfaces are achieved through femtosecond MHz burst Bessel beam ablation. Taking advantage of the long-depth focal field of the Bessel beam, high-density micropores with a diameter of 1.3 µm and a depth of 10.5 µm are prepared on metal by MHz burst accumulation; in addition, the rapid fabrication of 2000 micropores can be achieved in 1 s. The guidelines and experimental results illustrate that the formations of the wavelength-scale porous structures are the result of the co-action of the laser-induced periodic surface structure (LIPSS) effect and Bessel beam interference. Porous metal can be used to store lubricant and form a lubricating layer on the metallic surface, thus endowing the metal resistance to various liquids’ adhesion. The microporous formation process on metal provides a new physical insight for the rapid preparation of wavelength-scale metallic micropores, and promotes the application of porous metal in the fields of catalysis, gas adsorption, structural templates, and bio-transportation fields. Full article
(This article belongs to the Special Issue Advanced Bioinspired Nanomaterials with Superwettability)
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