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Search Results (268)

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Keywords = capacitive pressure sensors

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43 pages, 12970 KB  
Review
Recent Advancements in Gel-Based Flexible Electronic Sensors
by Vineet Kumar and Sang-Shin Park
Gels 2026, 12(5), 402; https://doi.org/10.3390/gels12050402 - 6 May 2026
Viewed by 436
Abstract
Gel-based flexible electronic sensors have emerged as a transformative class of materials for next-generation applications. These applications are wearable electronics, soft robotics, electronic skin (e-skin), and healthcare monitoring systems. Owing to their intrinsic softness, stretchability, and biocompatibility, gels provide an ideal platform for [...] Read more.
Gel-based flexible electronic sensors have emerged as a transformative class of materials for next-generation applications. These applications are wearable electronics, soft robotics, electronic skin (e-skin), and healthcare monitoring systems. Owing to their intrinsic softness, stretchability, and biocompatibility, gels provide an ideal platform for constructing highly deformable and skin-conformable sensing devices. This paper provides insight into emerging fabrication techniques, including 3D printing, bioprinting, and microfabrication. These techniques have facilitated the creation of complex architectures with improved sensitivity and scalability. The review also focuses on recent advancements that have focused on overcoming traditional limitations. These limitations are poor mechanical strength, dehydration, limited environmental stability, and low sensitivity. In particular, the incorporation of conductive fillers and ionic species has enabled a range of sensing mechanisms. These mechanisms include piezoresistive, capacitive, piezoelectric, and ionotronic responses. Therefore, it allows for the accurate detection of strain, pressure, temperature, and biochemical signals. Finally, this review provides a summary of future research, which is expected to focus on multifunctional integration, sustainable materials, and intelligent data processing. It provides pathways to the widespread adoption of gel-based flexible electronic sensors in both consumer and clinical applications. Full article
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18 pages, 4802 KB  
Article
Wirelessly Interrogated, Implantable Capacitive MEMS Sensors for Continuous Intraocular Pressure Monitoring
by Liguan Li, Adnan Zaman, Ramesh Ayyala and Jing Wang
Sensors 2026, 26(9), 2806; https://doi.org/10.3390/s26092806 - 30 Apr 2026
Viewed by 640
Abstract
This work presents wirelessly interrogated microelectromechanical system (MEMS) capacitive sensors for continuous intraocular pressure (IOP) monitoring. The sensor uses a passive inductor–capacitor (LC) tank circuit comprising a fixed, on-chip spiral inductor and a pressure-sensitive, variable-gap capacitor with parallel-plate membrane electrodes and side anchors. [...] Read more.
This work presents wirelessly interrogated microelectromechanical system (MEMS) capacitive sensors for continuous intraocular pressure (IOP) monitoring. The sensor uses a passive inductor–capacitor (LC) tank circuit comprising a fixed, on-chip spiral inductor and a pressure-sensitive, variable-gap capacitor with parallel-plate membrane electrodes and side anchors. The membrane is designed with dimensions of 500 µm × 500 µm × 2 µm and a capacitive transducer gap of 2.5 µm. Applied pressure deflects the top membrane, producing a corresponding capacitance variation that changes the frequency and phase response of the LC tank circuit, enabling real-time and continuous IOP monitoring over a target detection range of 0–50 mmHg and beyond. Mutual inductive coupling between the sensor and the external readout coil is investigated as a reliable readout mechanism. Full article
(This article belongs to the Section Intelligent Sensors)
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20 pages, 4898 KB  
Article
Highly Robust and Multimodal PVA/Aramid Nanofiber/MXene Organogel Sensors for Advanced Human–Machine Interfaces
by Guofan Zeng, Leiting Liao, Zehong Wu, Jinye Chen, Peidi Zhou, Yihan Qiu and Mingcen Weng
Biosensors 2026, 16(4), 229; https://doi.org/10.3390/bios16040229 - 20 Apr 2026
Viewed by 576
Abstract
Flexible and wearable electronics require soft sensing materials that balance mechanical compliance, stable signal transduction, and durability for human–machine interfaces (HMIs). To address the limitations of single-filler systems, we propose a poly(vinyl alcohol) (PVA)/aramid nanofiber (ANF)/MXene organogel (PAM) as a multifunctional soft platform. [...] Read more.
Flexible and wearable electronics require soft sensing materials that balance mechanical compliance, stable signal transduction, and durability for human–machine interfaces (HMIs). To address the limitations of single-filler systems, we propose a poly(vinyl alcohol) (PVA)/aramid nanofiber (ANF)/MXene organogel (PAM) as a multifunctional soft platform. This design integrates a PVA physically crosslinked network with ANF for mechanical reinforcement and MXene for electrical functionality. The optimized PAM composite exhibits outstanding mechanical properties, including a fracture stress of 2931 kPa, a fracture strain of 676%, and a fracture toughness of 9.04 MJ m−3. Importantly, PAM serves as a single material platform configurable into three sensing modalities. The resistive strain sensor achieves a gauge factor of 3.1 over 10–100% strain and enables the reliable recognition of human joint movements and gestures. The capacitive pressure sensor delivers a sensitivity of 0.298 kPa−1, rapid response/recovery times of 30/10 ms, and is integrated with a wireless module to control a smart car. Furthermore, the PAM-based triboelectric nanogenerator (TENG) delivers excellent electrical outputs (Voc = 123 V, Isc = 0.52 μA, Qsc = 58 nC) and functions as a self-powered smart handwriting pad, achieving a machine-learning-based recognition accuracy of 97.6%. This work demonstrates the immense potential of the PAM organogel for advanced, self-powered HMIs. Full article
(This article belongs to the Special Issue Flexible and Stretchable Biosensors)
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19 pages, 1153 KB  
Systematic Review
Technical Characteristics and Biomedical Applications of Flexible Pressure Sensor Matrices: A Scoping Review
by Stefano Cimignolo, Damiano Fruet, Giandomenico Nollo and Michela Masè
Sensors 2026, 26(6), 1971; https://doi.org/10.3390/s26061971 - 21 Mar 2026
Viewed by 722
Abstract
Flexible pressure sensors have been increasingly proposed for clinical monitoring applications. However, the available evidence on the technical characteristics and the biomedical applications of these technologies remains fragmented. To fill this gap, this scoping review aimed to map the available literature (i) to [...] Read more.
Flexible pressure sensors have been increasingly proposed for clinical monitoring applications. However, the available evidence on the technical characteristics and the biomedical applications of these technologies remains fragmented. To fill this gap, this scoping review aimed to map the available literature (i) to identify the existing flexible pressure sensor matrices proposed for biomedical applications, their technical characteristics, and usage contexts, and (ii) to determine the systems integrated into bed-based support surfaces for clinical monitoring functions. The scoping review was conducted following the guidelines of the Preferred Reporting Items for Systematic Reviews and Meta-Analyses extension for scoping reviews. PubMed, Scopus, and Web of Science databases were systematically searched to identify studies published between 2015 and 2025 that describe flexible pressure sensor matrices for biomedical monitoring and care applications. A total of 5021 records were screened, and 45 studies were included. Existing flexible pressure sensor matrices were mainly based on resistive and capacitive principles. Systems integrated into clinical support surfaces were primarily used for pressure distribution and posture monitoring, and spanned from experimental prototypes to commercially available technologies. A lack of technical specifications and relevant heterogeneity was observed among the studies. Flexible pressure sensors demonstrated potential for clinical monitoring, but standardized technological reporting and clinical validation protocols are needed to develop technically robust and clinically oriented pressure sensing solutions. Full article
(This article belongs to the Special Issue Sensor Techniques for Signal, Image and Video Processing)
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24 pages, 7790 KB  
Review
Flexible Pressure Sensors from a Multidisciplinary Perspective: Principles, Material Selection and Application Expansion
by Lichao Liu, Huihui Zhu, Xuefeng Gu, Ping Hu, Yang Chen, Pengjia Qi and Kai Liu
Chemosensors 2026, 14(3), 71; https://doi.org/10.3390/chemosensors14030071 - 17 Mar 2026
Viewed by 1379
Abstract
As wearable electronic products have been integrated into daily life, flexible pressure sensors, which convert pressure into electrical signals, have become a research focus because of their cross-industry application potential. Despite an increasing number of related studies, the systematic integration of discussions on [...] Read more.
As wearable electronic products have been integrated into daily life, flexible pressure sensors, which convert pressure into electrical signals, have become a research focus because of their cross-industry application potential. Despite an increasing number of related studies, the systematic integration of discussions on sensing mechanisms, performance regulation, and multiscenario adaptability remains to be explored. In this paper, core sensing mechanisms such as piezoresistive, capacitive, piezoelectric, and triboelectric mechanisms are systematically reviewed; key performance indicators, including sensitivity, response time, and linearity, are analyzed; construction strategies for diverse substrates and conductive functional materials are explored; and applications in healthcare, human–computer interaction, and electronic skin are elaborated on. The aim of these analyses is to provide practical insights into the development and design of flexible pressure sensors, thus providing a useful reference for advancing these technologies and expanding their cross-domain use. Full article
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31 pages, 1196 KB  
Review
Beyond the Cuff: State-of-the-Art on Cuffless Blood Pressure Monitoring
by Yaheya Shafti, Steven Hughes, William Taylor, Muhammad A. Imran, David Owens and Shuja Ansari
Sensors 2026, 26(4), 1243; https://doi.org/10.3390/s26041243 - 14 Feb 2026
Viewed by 1507
Abstract
Blood pressure (BP) monitoring is crucial for identifying high BP (hypertension) and is an important aspect of patient care. However, traditional cuff-based methods for BP monitoring are unsuitable for continuous monitoring and can cause discomfort to patients. This survey critically examines the emerging [...] Read more.
Blood pressure (BP) monitoring is crucial for identifying high BP (hypertension) and is an important aspect of patient care. However, traditional cuff-based methods for BP monitoring are unsuitable for continuous monitoring and can cause discomfort to patients. This survey critically examines the emerging field of cuffless BP monitoring, highlighting advances beyond traditional cuff-based methods. Technologies such as radar, optical, acoustic, and capacitive sensors offer the potential for continuous, non-invasive BP estimation, enabling applications in remote health monitoring and ambient clinical intelligence. We introduce a unifying taxonomy covering sensing modalities, physiological measurement principles, signal processing techniques, and translational challenges. Emphasis is placed on methods that eliminate subject-specific calibration, overcome motion artifacts, and satisfy international validation standards. The review also analyses Machine Learning (ML) and sensor fusion approaches that enhance predictive accuracy. Despite encouraging results, challenges remain in achieving clinically acceptable accuracy across diverse populations and real-world conditions. This work delineates the current landscape, benchmarks performance against gold standards, and identifies key future directions for scalable, explainable, and regulatory-compliant BP monitoring systems. Full article
(This article belongs to the Section Biomedical Sensors)
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13 pages, 1707 KB  
Article
A Novel Design of Industrial Reconfigurable CDC
by Karim M. Abozeid, Hassan Mostafa, A. H. Khalil and Mohamed Refky
Chips 2026, 5(1), 6; https://doi.org/10.3390/chips5010006 - 5 Feb 2026
Viewed by 798
Abstract
This paper presents a novel design for a reconfigurable CDC as a multiplexed sensor fusion that converts three analog signals into digital output bits with different resolutions. The proposed reconfigurable CDC design uses the SAR technique that introduces a small chip area and [...] Read more.
This paper presents a novel design for a reconfigurable CDC as a multiplexed sensor fusion that converts three analog signals into digital output bits with different resolutions. The proposed reconfigurable CDC design uses the SAR technique that introduces a small chip area and low power consumption. The proposed novel CDC introduces reconfigurability by using a switching capacitive DAC that solves the problem of converting more than one analog signal with a single converter to a different number of output bits, giving better performance than previous designs. In this paper, three analog signals are used (as a case study) in a weather station to be converted. These signals are temperature, pressure, and humidity that are sensed using the BME-280 Bosch sensor. All CDC specifications are measured for each reconfigured number of output bits. The used supply voltage is 1.0 V, and the sampling frequency is 100 kHz. The 12-bit resolution consumes 2.54 µW, ENOB is 11.47 bits, and SNR equals 73.4 dB. The 8-bit resolution consumes 1.7 µW, ENOB is 7.39 bits, and SNR equals 46.24 dB. The 4-bit resolution consumes 0.68 µW, ENOB is 3.58 bits, and SNR equals 23.45 dB. The total chip area is 0.18 mm2. Full article
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22 pages, 3453 KB  
Review
Diamond Sensor Technologies: From Multi Stimulus to Quantum
by Pak San Yip, Tiqing Zhao, Kefan Guo, Wenjun Liang, Ruihan Xu, Yi Zhang and Yang Lu
Micromachines 2026, 17(1), 118; https://doi.org/10.3390/mi17010118 - 16 Jan 2026
Viewed by 1475
Abstract
This review explores the variety of diamond-based sensing applications, emphasizing their material properties, such as high Young’s modulus, thermal conductivity, wide bandgap, chemical stability, and radiation hardness. These diamond properties give excellent performance in mechanical, pressure, thermal, magnetic, optoelectronic, radiation, biosensing, quantum, and [...] Read more.
This review explores the variety of diamond-based sensing applications, emphasizing their material properties, such as high Young’s modulus, thermal conductivity, wide bandgap, chemical stability, and radiation hardness. These diamond properties give excellent performance in mechanical, pressure, thermal, magnetic, optoelectronic, radiation, biosensing, quantum, and other applications. In vibration sensing, nano/poly/single-crystal diamond resonators operate from MHz to GHz frequencies, with high quality factor via CVD growth, diamond-on-insulator techniques, and ICP etching. Pressure sensing uses boron-doped piezoresistive, as well as capacitive and Fabry–Pérot readouts. Thermal sensing merges NV nanothermometry, single-crystal resonant thermometers, and resistive/diode sensors. Magnetic detection offers FeGa/Ti/diamond heterostructures, complementing NV. Optoelectronic applications utilize DUV photodiodes and color centers. Radiation detectors benefit from diamond’s neutron conversion capability. Biosensing leverages boron-doped diamond and hydrogen-terminated SGFETs, as well as gas targets such as NO2/NH3/H2 via surface transfer doping and Pd Schottky/MIS. Imaging uses AFM/NV probes and boron-doped diamond tips. Persistent challenges, such as grain boundary losses in nanocrystalline diamond, limited diamond-on-insulator bonding yield, high temperature interface degradation, humidity-dependent gas transduction, stabilization of hydrogen termination, near-surface nitrogen-vacancy noise, and the cost of high-quality single-crystal diamond, are being addressed through interface and surface chemistry control, catalytic/dielectric stack engineering, photonic integration, and scalable chemical vapor deposition routes. These advances are enabling integrated, high-reliability diamond sensors for extreme and quantum-enhanced applications. Full article
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8 pages, 4250 KB  
Communication
A Dual-Mode Flexible Sensor with Capacitive–Resistive Hybrid Response for Bolt Loosening Monitoring
by Yan Ping, Kechen Li, Chao Yuan, Ding Guo and Yuanyuan Yang
Sensors 2026, 26(2), 578; https://doi.org/10.3390/s26020578 - 15 Jan 2026
Viewed by 461
Abstract
The structural health monitoring of bolted connections is important for ensuring the safety and reliability of engineering systems, yet conventional sensing technologies struggle to balance detection range and sensitivity. This study presents a flexible sensor with a hybrid capacitive–resistive sensing mechanism, designed to [...] Read more.
The structural health monitoring of bolted connections is important for ensuring the safety and reliability of engineering systems, yet conventional sensing technologies struggle to balance detection range and sensitivity. This study presents a flexible sensor with a hybrid capacitive–resistive sensing mechanism, designed to overcome the limitations of single-mode sensors. By integrating a hierarchically structured composite layer with tailored material properties, the sensor achieves a seamless transition between sensing modes across different pressure ranges. It exhibits high sensitivity in both low-pressure and high-pressure regions, enabling the reliable detection of preload variations in bolted connections. Experimental validation confirms its cyclic durability and rapid response to mechanical changes, demonstrating good potential for real-time monitoring in aerospace and industrial systems. Full article
(This article belongs to the Special Issue Flexible Sensing in Robotics, Healthcare, and Beyond)
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15 pages, 10072 KB  
Article
Highly Sensitive Capacitive Pressure Sensor Based on MWCNTs/TiO2/PDMS with a Microhemispherical Array and APTES-Modified Interface
by Yijin Ouyang, Jianyong Lei, Shuge Li, Guotian He and Songxiying He
Polymers 2026, 18(1), 12; https://doi.org/10.3390/polym18010012 - 20 Dec 2025
Viewed by 880
Abstract
The rapid advancement of humanoid robotics has spurred researchers’ interest in flexible sensors for wide linear range detection. In response, we report a capacitive flexible pressure sensor based on a multi-walled carbon nanotubes/titanium dioxide/polydimethylsiloxane (MWCNTs/TiO2/PDMS) composite. A micro-hemispherical structure array formed [...] Read more.
The rapid advancement of humanoid robotics has spurred researchers’ interest in flexible sensors for wide linear range detection. In response, we report a capacitive flexible pressure sensor based on a multi-walled carbon nanotubes/titanium dioxide/polydimethylsiloxane (MWCNTs/TiO2/PDMS) composite. A micro-hemispherical structure array formed on the composite surface via a templating method reduces the initial capacitance value. Modified carbon nanotubes (F-MWCNTs) were prepared using 2 wt%, 5 wt% and 10 wt% γ-aminopropyltriethoxysilane (APTES), significantly enhancing dispersion and interfacial bonding strength. The synergistic effect of microstructures and MWCNTs surface functionalization further enhances sensing performance. The F-MWCNTs/TiO2/PDMS pressure sensor modified with 2 wt% APTES exhibits outstanding sensing capabilities: it demonstrates dual-stage sensitivity across a broad linear range of 0–95 kPa (0–13 kPa segment: 1.89 ± 0.49 kPa−1; 13–95 kPa segment: 7.08 ± 0.63 kPa−1), with a response time of 200 milliseconds, maintaining stability over 2500 cyclic loadings. In practical application exploration, this sensor has demonstrated strong adaptability, confirming its significant potential in micro-pressure detection, wearable electronics, and array sensing applications. Full article
(This article belongs to the Section Polymer Applications)
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43 pages, 9967 KB  
Review
Flexible Sensing for Precise Lithium-Ion Battery Swelling Monitoring: Mechanisms, Integration Strategies, and Outlook
by Yusheng Lei, Jinwei Zhao, Yihang Wang, Chenyang Xue and Libo Gao
Sensors 2025, 25(24), 7677; https://doi.org/10.3390/s25247677 - 18 Dec 2025
Cited by 1 | Viewed by 1681
Abstract
The expansion force generated by lithium-ion batteries during charge–discharge cycles is a key indicator of their structural safety and health. Recently, flexible pressure-sensing technologies have emerged as promising solutions for in situ swelling monitoring, owing to their high flexibility, sensitivity and integration capability. [...] Read more.
The expansion force generated by lithium-ion batteries during charge–discharge cycles is a key indicator of their structural safety and health. Recently, flexible pressure-sensing technologies have emerged as promising solutions for in situ swelling monitoring, owing to their high flexibility, sensitivity and integration capability. This review provides a systematic summary of progress in this field. Firstly, we discuss the mechanisms of battery swelling and the principles of conventional measurement methods. It then compares their accuracy, dynamic response and environmental adaptability. Subsequently, the main flexible pressure-sensing mechanisms are categorized, including piezoresistive, capacitive, piezoelectric and triboelectric types, and their material designs, structural configurations and sensing behaviors are discussed. Building on this, we examine integration strategies for flexible pressure sensors in battery systems. It covers surface-mounted and embedded approaches at the cell level, as well as array-based and distributed schemes at the module level. A comparative analysis highlights the differences in installation constraints and monitoring capabilities between these approaches. Additionally, this section also summarizes the characteristics of swelling signals and recent advances in data processing techniques, including AI-assisted feature extraction, fault detection and health state correlation. Despite their promise, challenges such as long-term material stability and signal interference remain. Future research is expected to focus on high-performance sensing materials, multimodal sensing fusion and intelligent data processing, with the aim of further advancing the integration of flexible sensing technologies into battery management systems and enhancing early warning and safety protection capabilities. Full article
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22 pages, 4663 KB  
Article
An Application for Through-Vial Impedance Spectroscopy (TVIS) in the Qualification of the Pirani-Gauge Assessment of the Ice Sublimation Endpoint
by Pathum Subash Wijesekara, Kiran Malik, Paul Matejtschuk and Geoff Smith
Pharmaceutics 2025, 17(12), 1542; https://doi.org/10.3390/pharmaceutics17121542 - 29 Nov 2025
Viewed by 783
Abstract
Background/Objectives: All the industry standard methods for monitoring the freeze-drying process, from the single-vial assessment using temperature probes, such as thermocouples, to batch assessments using comparative pressure measurements, have poorly defined transitions marking the end of ice sublimation. In this study, through-vial impedance [...] Read more.
Background/Objectives: All the industry standard methods for monitoring the freeze-drying process, from the single-vial assessment using temperature probes, such as thermocouples, to batch assessments using comparative pressure measurements, have poorly defined transitions marking the end of ice sublimation. In this study, through-vial impedance spectroscopy (TVIS) is used to characterise and validate the point on the Pirani curve that corresponds to the end of ice sublimation. The impact of the solution composition in relation to its propensity to form crystalline and amorphous domains and the impact of the batch size were investigated. Methods: Individual TVIS vials were placed at specific positions across the shelf, in order to represent the core and edge vials of the batch. The unique features of the high-frequency real part capacitance, with its precise sublimation endpoint-defining plateau, were then used to map the individual-vial sublimation endpoints onto the Pirani profile, with a view to predicting the batch sublimation endpoint. Results: TVIS vial endpoints enabled a key observation that the shape of the Pirani profile may be analysed in terms of two phases, the first being largely associated with ice sublimation and the second being associated with water desorption. Moreover, by identifying the transition point more precisely, even in the small to intermediate scale systems, we provide a scientific basis for predicting the sublimation endpoint for production-scale dryers, where Pirani sensors are already in place. Conclusions: Such qualification of batch sublimation endpoints would allow for earlier, confident switching to the secondary drying stage without unnecessary delay, leading to shorter cycles, reduced energy consumption, and improved utilisation of costly freeze-drying infrastructure. Full article
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25 pages, 11669 KB  
Article
Cyber–Physical–Human System for Elderly Exercises Based on Flexible Piezoelectric Sensor Array
by Qingwei Song, Chyan Zheng Siow, Takenori Obo and Naoyuki Kubota
Appl. Sci. 2025, 15(23), 12519; https://doi.org/10.3390/app152312519 - 25 Nov 2025
Viewed by 654
Abstract
Developing flexible, cost-effective, and durable sensors is a key challenge for integrating Cyber–Physical–Human Systems (CPHSs) into smart homes. This paper introduces a flexible pressure sensor array designed for CPHS applications, addressing the need for cost-effective and durable sensors in smart homes. Our approach [...] Read more.
Developing flexible, cost-effective, and durable sensors is a key challenge for integrating Cyber–Physical–Human Systems (CPHSs) into smart homes. This paper introduces a flexible pressure sensor array designed for CPHS applications, addressing the need for cost-effective and durable sensors in smart homes. Our approach combines flexible piezoelectric materials with Swept Frequency Capacitive Sensing (SFCS). Unlike previous pressure sensors made of flexible piezoelectric materials, which can only measure dynamic pressure due to charge leakage, by using SFCS, the piezoelectric material is not directly in the circuit, and our sensor can effectively measure static pressure. While traditional arrays require multiple I/O ports or a matrix configuration, our design measures four distinct locations using only a single I/O port. The sensor is also mechanically flexible and exhibits high durability, capable of functioning even after being cut or torn, provided the electrode contact area remains largely intact. To decode the complex, multiplexed signal from this single channel, we developed a two-stage deep learning pipeline. We utilized data from thin-film resistive pressure sensors as ground truth. A classification model determines which of the four sensors are being touched. Then a regression model uses this touch-state information to estimate the corresponding pressure values. This pipeline employs a hybrid architecture that integrates Convolutional Neural Networks (CNNs) and Long Short-Term Memory (LSTM) networks. The results show that the system can estimate pressure values at each location. To demonstrate its application, the sensor system was integrated into a power recliner, thereby transforming the chair into an interactive tool for daily exercise designed to improve the well-being of older adults. This successful implementation establishes a viable pathway for the development of intelligent, interactive furniture for in-home exercise and rehabilitation within the CPHS paradigm. Full article
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15 pages, 4568 KB  
Article
Development of Vacuum-Chamber-Type Capacitive Micro-Pressure Sensors
by Lung-Jieh Yang, De-Yu Jiang, Wei-Chen Wang, Chandrashekhar Tasupalli, Horng-Yuan Shih and Yi-Jen Wang
Micromachines 2025, 16(11), 1290; https://doi.org/10.3390/mi16111290 - 18 Nov 2025
Viewed by 2548
Abstract
This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 μm CMOS-MEMS process, incorporated with additional post-processing steps such as metal wet etching, supercritical CO2 [...] Read more.
This study presents the development of a capacitive pressure sensor tailored for measuring the dynamic pressure of flow fields. The sensor is fabricated using the UMC 0.18 μm CMOS-MEMS process, incorporated with additional post-processing steps such as metal wet etching, supercritical CO2 drying, and parylene encapsulation. The sensing architecture employs AD7746 as a capacitance-to-voltage converter (CVC), enabling the conversion of capacitance signals into voltage outputs for enhanced measurement fidelity. Structurally, the capacitive pressure sensor features a vacuum-sealed diaphragm capsule design with dual movable circular membranes functioning as sensing electrodes. A contact-mode capacitive configuration with a trapezoidal or Gong-like vacuum-chamber diaphragm is adopted to improve linearity and sensitivity. The output sensitivity was determined to be feasible for measuring dynamic pressure at 1–2 Pa resolution. Full article
(This article belongs to the Special Issue CMOS-MEMS Fabrication Technologies and Devices, 2nd Edition)
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12 pages, 1561 KB  
Proceeding Paper
Low-Cost Remote Sensing Module for Agriculture 4.0 Based on STM32
by Gustavo Gimenes, Wenderson Nascimento Lopes, Ronald José Contijo, Reinaldo Götz de Oliveira Junior and Renan de Oliveira Alves Takeuchi
Eng. Proc. 2025, 118(1), 97; https://doi.org/10.3390/ECSA-12-26544 - 7 Nov 2025
Viewed by 850
Abstract
Agriculture 4.0 integrates smart technologies to optimize agricultural management. This work proposes the development of a low-cost remote sensing module for small producers in the north of Paraná, Brazil, using the STM32F411CEU6 (STMicroelectronics, Geneva, Switzerland) microcontroller and the nRF24L01 (Nordic Semiconductor, Trondheim, Norway) [...] Read more.
Agriculture 4.0 integrates smart technologies to optimize agricultural management. This work proposes the development of a low-cost remote sensing module for small producers in the north of Paraná, Brazil, using the STM32F411CEU6 (STMicroelectronics, Geneva, Switzerland) microcontroller and the nRF24L01 (Nordic Semiconductor, Trondheim, Norway) + module for mesh communication. The system measures temperature, humidity, and pressure using DS18B20, BME280, and capacitive soil moisture sensors via Inter-Integrated Circuit (I2C), Serial Peripheral Interface (SPI), and Analog-to-Digital Converter (ADC). Powered by a solar cell and Lithium Polymer (Li-Po) battery, along with a charge controller, the module acts as a transceiver, sending data to a gateway where it can be stored and analyzed, democratizing access to technology and supporting decision-making in crop management. Full article
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