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Keywords = direct inverse asymmetric PI model

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Article
Improving Atomic Force Microscopy Imaging by a Direct Inverse Asymmetric PI Hysteresis Model
by Dong Wang, Peng Yu, Feifei Wang, Ho-Yin Chan, Lei Zhou, Zaili Dong, Lianqing Liu and Wen Jung Li
Sensors 2015, 15(2), 3409-3425; https://doi.org/10.3390/s150203409 - 3 Feb 2015
Cited by 23 | Viewed by 8098
Abstract
A modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM [...] Read more.
A modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describe the asymmetric motion of the actuator. In order to improve the accuracy of AFM scans, two series of slope parameters were introduced in the PI model to describe both the voltage-increase-loop (trace) and voltage-decrease-loop (retrace). A feedforward controller based on the DIAPI model was implemented to compensate hysteresis. Performance of the DIAPI model and the feedforward controller were validated by scanning micro-lenses and standard silicon grating using a custom-built AFM. Full article
(This article belongs to the Special Issue Smart Materials for Switchable Sensors)
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