Search Results (240)

Optical phase modulation is essential for a wide range of silicon photonic integrated circuits used in communication applications. In this study, an optical phase shifter utilizing photo-elastic effects is proposed, where mechanical stress is induced by electrostatic micro-electro-mechanical systems (MEMS) with actuators arranged in a comb drive configuration. The design incorporates suspended serpentine silicon nitride (SiN) optical waveguides. Through extensive numerical simulations, it is shown that the change in the effective refractive index (n_eff) of the optical waveguide is a function of the voltage applied to the electrostatic actuators and that such n_eff tuning can be achieved for a broad range of wavelengths. Implemented within one arm of an unbalanced Mach–Zehnder interferometer (MZI), the phase shifter achieves a phase change of π when the stressed optical path measures 4.7 mm, and the actuators are supplied with 80 V DC and consume almost no power. This results in a half-wave voltage-length product (V_πL) of 37.6 V·cm. Comparative analysis with contemporary optical phase shifters highlights the proposed design’s superior power efficiency, compact footprint, and simplified fabrication process, making it a highly efficient component for reconfigurable MEMS-based silicon nitride photonic integrated circuits. Full article

This paper presents a fully electronic, CMOS-compatible ultrasonic sensing system integrated into a 3D beamforming architecture for advanced automotive applications. The proposed system eliminates mechanical scanning by implementing a dual-path beamforming structure comprising programmable transmit (TX) and receive (RX) paths. The TX beamformer introduces per-element time delays derived from steering angles to control the direction of ultrasonic wave propagation, while the RX beamformer aligns echo signals for spatial focusing. Electrostatic actuation governs the CMOS-compatible ultrasonic transmission mechanism, whereas dynamic modulation under acoustic pressure forms the reception mechanism. The system architecture supports full horizontal and vertical angular coverage, leveraging delay-and-sum processing to achieve electronically steerable beams. The system enables low-power, compact, and high-resolution sensing modules by integrating signal generation, beam control, and delay logic within a CMOS framework. Theoretical modeling demonstrates its capability to support fine spatial resolution and fast response, making it suitable for integration into autonomous vehicle platforms and driver-assistance systems. Full article

Firstly, this paper reviews the fundamental theories of solid surface wettability and contact angle hysteresis. Subsequently, it further introduces four typical wettability-engineered surfaces with low hysteresis (superhydrophobic, superamphiphobic, super-slippery, and liquid-like smooth surfaces). Finally, it focuses on the latest research progress in the field of droplet manipulation on open planar surfaces with engineered wettability. To achieve droplet manipulation, the core driving forces primarily stem from natural forces guided by bioinspired gradient surfaces or the regulatory effects of external fields. In terms of bioinspired self-propelled droplet movement, this paper summarizes research inspired by natural organisms such as desert beetles, cacti, self-aligning floating seeds of emergent plants, or water-walking insects, which construct bioinspired special gradient surfaces to induce Laplace pressure differences or wettability gradients on both sides of droplets for droplet manipulation. Moreover, this paper further analyzes the mechanisms, advantages, and limitations of these self-propelled approaches, while summarizing the corresponding driving force sources and their theoretical formulas. For droplet manipulation under external fields, this paper elaborates on various external stimuli including electric fields, thermal fields, optical fields, acoustic fields, and magnetic fields. Among them, electric fields involve actuation mechanisms such as directly applied electrostatic forces and indirectly applied electrocapillary forces; thermal fields influence droplet motion through thermoresponsive wettability gradients and thermocapillary effects; optical fields cover multiple wavelengths including near-infrared, ultraviolet, and visible light; acoustic fields utilize horizontal and vertical acoustic radiation pressure or acoustic wave-induced acoustic streaming for droplet manipulation; the magnetic force acting on droplets may originate from their interior, surface, or external substrates. Based on these different transport principles, this paper comparatively analyzes the unique characteristics of droplet manipulation under the five external fields. Finally, this paper summarizes the current challenges and issues in the research of droplet manipulation on the open planar surfaces and provides an outlook on future development directions in this field. Full article

In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror generate a Lissajous scanning pattern within an artificial eyeball. The scanning pattern reflected from the eyeball is detected by a linear photodiode sensor array (LPSA). The direction and rotation angle of the artificial eyeball result in varying grayscale values across a series of pixels detected by the LPSA, in which the average grayscale values change accordingly. By performing a linear fit between different rotation angles of the same eye movement direction and the corresponding grayscale values, we can determine the correlation between the direction of eye movement and the signal magnitude received by the LPSA, thereby enabling precise eye tracking. The results demonstrated that the minimum resolution was 0.6°. This preliminary result indicates that the system has good accuracy. In the future, this eye-tracking system can be integrated into various wearable glasses devices and applied in various fields, including medicine and psychology. Full article

The high-precision gravitational reference sensor, which hosts a heavy test mass (TM) surrounded by electrodes with a relatively large gap, is crucial in all high-sensitivity drag-free sensors. Consequently, a dedicated locking mechanism is needed to securely hold the TM during the launch phase. After reaching the intended orbit, the TM is released to a free-falling state and subsequently captured by electrostatic actuation, which demands that the transferred momentum and angular momentum to the TM do not exceed ${10}^{-5}\mathrm{kgm}/\mathrm{s}$ and ${10}^{-7}{\mathrm{kgm}}^2/\mathrm{s}$, respectively. This paper introduces a three-level structural design of the locking-and-release mechanism. In order to investigate the release requirement, a pendulum system has been developed for on-ground testing. The mock-up of the TM is entirely consistent with the size and mass of TianQin TM, and the dual-sided release tips constrain the TM and then rapidly retract simultaneously, after which the transferred momentum and angular momentum are estimated from the free oscillations as $0.38\left(21\right)\times {10}^{-5}\mathrm{kgm}/\mathrm{s}$ and $0.15\left(14\right)\times {10}^{-7}{\mathrm{kgm}}^2/\mathrm{s}$ with a preload force of 0.3 N. This proposes a feasible scheme for validating the release mechanism conducting impulse testing for the TianQin project. Full article

Artificial muscles underlie exciting, novel technologies that have many wide-reaching applications: exoskeleton actuation, walker robots, prosthetics and stealthy underwater propulsion. Actuating these muscles via electrostatic forces promises excellent energy efficiency and output force density and a high strength-to-weight ratio. Building these muscles through 3D-printed and conductive microfluidics promises fast mass production at a low cost. A microfluidic double-helix weave as a potential solution for the architectural design of these actuators has previously been reported. However, more recent experimental work showed that a weave architecture was not manufacturable at the necessary scale, given the limitations of current 3D-printing technology. Herein, several alternative architectures are presented. They are more advanced and more compatible with current manufacturing requirements, and offer additional benefits. The presented experimental results confirm their improvements in manufacturability. These advanced architectures represent a significant step towards the experimental proof of principle and the practical implementation of electrostatic microfluidic 3D-printed artificial muscles. Full article

Electrostatic actuation is widely employed in microelectromechanical systems (MEMS) due to its distinct advantages. However, it requires high voltage, typically provided by a power supply and a high voltage amplifier, which is limited in gain, especially at high frequencies. Various methods have been proposed to amplify the voltage signal fed into the system by coupling it in series to an LC tank circuit. In this work, we analyze and compare three methods, resonance matching, multi-frequency excitation, and amplitude modulation. We also compare their performance to that of a voltage amplifier. We demonstrate that resonant circuits significantly enhance performance, offering a more effective solution for high-frequency MEMS actuation. Full article

The muscle-like movement and speed of the electrohydraulic actuator have granted it much attention in soft robotics. Our aim is to review the advancements in electrohydraulic actuators inspired by the Hydraulically Amplified Self-healing Electrostatic (HASEL) actuator. With this paper, we focus on the performance of 21 electrohydraulic actuator designs developed across five Universities, ranging from the earliest HASEL designs to the latest electrohydraulic designs. These actuators reported up to 60 N forces and contracting strains of up to 99%. The actuators with the best overall performance so far have been the Quadrant HASEL actuator and the HEXEL actuator, developed at the University of Colorado Boulder. However, notable is also the HALVE actuator (produced by ETH Zürich, Switzerland), which, by using a 5 µm PVDF-TrFE-CTFE film with a relative permittivity of 40, produced 100 times the electrostatic force of any of the electrohydraulic actuators under review. The latter shows that there is room for improvement as low force and displacement still limit the viability of the soft actuators in real-life applications. Full article

Persistently and reliably harvesting wind energy to power intelligent online monitoring devices for transmission lines promotes the intelligent and sustainable development of the Internet of Things. Current small-scale wind-energy-harvesting devices, relying on a single energy conversion principle, face challenges such as low efficiency and poor performance at low wind speeds. This paper presents a coaxial rotating non-contact coupling transducer structure, and its optimization methods have been studied, which are based on electret electrostatic induction and magnetically actuated piezoelectric conversion. By analyzing the principles of alternating positive–negative unipolar electret components and constructing a finite element model, improved output capacity is demonstrated. The electric signals from electret components are more suitable for inferring the shaft and wind speeds compared to piezoelectric components. The piezoelectric components utilize frequency up-conversion theory to enhance output while addressing the low power density of the electrostatic components. Experimental results indicate that the proposed structure operates reliably at rotational speeds of 100–700 rpm, achieving a maximum output power of 6.742 mW. The output power of the electret electrostatic component’s electrodes nearly doubled, with the signal positively correlated to rotation speed. The optimized structure of the magnetically actuated piezoelectric component achieved a power increase of 11.51% at four excitations and 250 rpm. This study provides a new design approach for more durable and efficient small-scale wind-energy-harvesting devices, as well as for achieving integrated measurement and supply. Full article

An innovative glass substrate surface technology including integrated micro-electro-mechanical systems (MEMS) is presented as an advanced light modulation, heat control, and energy management system. This smart technology is based on millions of metallic micromirrors per square meter fabricated on the glass surface, which are arranged in arrays and electrostatically actuated. The smart window application exploits an elaborate MEMS glass technology for active daylight steering and energy management in buildings, enabling energy saving, CO₂ emission reduction, a positive health impact, and improved well-being. When light interacts with a glass substrate that has regular, repetitive patterning at the microscopic scale on its surface, these microstructures can cause the diffraction of the transmitted light, resulting in the potential deterioration of the view quality through the smart glass. A reduction in optical artifacts for improved clear view is presented by using irregular geometric micromirror apertures. Several non-periodic, irregular micromirror aperture designs are compared with corresponding periodic regular designs. For each considered aperture geometry, the irregular array reveals a reduction in optical artifacts and, therefore, by far a clearer view than the corresponding regular array. A systematic and comprehensive study was conducted through design, simulation, technological fabrication, experimental characterization, and analysis. Full article

The pull-in and pull-out voltages are important characteristics of Capacitive Micromachined Ultrasound Transducers (CMUTs), marking the transition between conventional and collapse operation regimes. These voltages are commonly determined using capacitance–voltage (C-V) sweeps. By modeling the operating conditions of an LCR meter in COMSOL Multiphysics^®, we demonstrate that the measured capacitance comprises both static and dynamic capacitances, with the dynamic capacitance causing the appearance of a peak in the effective C-V curve. Furthermore, Laser Doppler Vibrometer (LDV) measurements and electromechanical simulations indicate the occurrence of collapse–snapback phenomena during the C-V sweeps. This study, through advanced simulations and experimental analyses, demonstrates that the transient membrane behavior significantly affects the apparent capacitance–voltage characteristics of electrostatically actuated Micro-Electromechanical Systems (MEMS). Full article

This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive–voltage (C-V) measurement technique. In order to understand how geometric hinge parameters, initial opening angles, and materials affect the overall efficiency and functionality of the system, micromirror arrays have been analyzed using C-V measurements considering (i) full and broken hinge structures, (ii) 90° and 130° initial tilt angles (Φ), and (iii) different material layer combinations. The measurement results indicate that both an increase in the Young’s modulus of the applied materials and increasing the initial tilt angles increase the threshold voltages during the closing process of the micromirrors. Full article

This paper reviews and compares electrostatically actuated MEMS (micro-electro-mechanical system) arrays for light modulation and light steering in which transmission through the substrate is required. A comprehensive comparison of the technical achievements of micromirror arrays and microshutter arrays is provided. The main focus of this paper is MEMS micromirror arrays for smart glass in building windows and façades. This technology utilizes millions of miniaturized and actuatable micromirrors on transparent substrates, enabling use with transmissive substrates such as smart windows for personalized daylight steering, energy saving, and heat management in buildings. For the first time, subfield-addressable MEMS micromirror arrays with an area of nearly 1 m² are presented. The recent advancements in MEMS smart glass technology for daylight steering are discussed, focusing on aspects like the switching speed, scalability, transmission, lifetime study, and reliability of micromirror arrays. Finally, simulations demonstrating the potential yearly energy savings for investments in MEMS smart glazing are presented, including a comparison to traditional automated external blind systems in a model office room with definite user interactions throughout the year. Additionally, this platform technology with planarized MEMS elements can be used for laser safety goggles to shield pilots, tram, and bus drivers as well as security personal from laser threats, and is also presented in this paper. Full article

Due to the small size of the micro aircraft, it has high permeability and concealability, holding promise in application in the military and civil fields, and it has become a domestic and international research frontier and hotspot in the past decade. However, caused by the heavy onboard power supply and the decline in the actuator’s operating power at micro sizes, untethered flight is still a development difficulty at present. In this paper, we introduce a new micro vehicle configuration which is driven by onboard capacitive energy and can realise off-line free flight under the drive of electrostatic actuators. In the overall design, this paper proposes structural capacitors as the energy supply unit and buoyancy unit of the vehicle, which can overcome part of the vehicle body’s weight by being filled with helium gas, while the capacitor can provide electrical energy for the propulsion unit. The micro vehicle has a wingspan of 5 cm, a total mass of 165 mg, a stable operating voltage between 1300 V and 2400 V, and a flight time of more than 60 s under the condition of an onboard capacitor power supply. The micro vehicle designed in this thesis has a small wingspan, light weight, and better concealment, and it has broad application prospects in the future in environmental reconnaissance, surveying, and other scenarios. Full article

A two-dimensional array of microfluidic ports with remote-controlled valve actuation is of great interest for applications involving localized chemical stimulation. Herein, a macroporous silicon-based platform where each pore contains an independently controllable valve made from poly(N-isopropylacrylamide) (PNIPAM) brushes is proposed. These valves are coated with silica-encapsulated gold nanorods (GNRs) for NIR-actuated switching capability. The layer-by-layer (LBL) electrostatic deposition technique was used to attach the GNRs to the PNIPAM brushes. The deposition of GNRs was confirmed by dark-field optical microscopy, and the localized surface plasmon resonance (LSPR) of the deposited GNRs was analyzed using UV-Vis spectra. To evaluate the chemical release behaviors, fluorescein dye was employed as a model substance. The chemical release properties, like OFF-state diffusion through the valve, the ratio between ON-state and OFF-state chemical release, and the rapidness of chemical modulation of the valve, were investigated, varying the PNIPAM brush thickness. The results indicate that enhancing the thickness of the PNIPAM brush in our platform improves control over the chemical modulation properties. However, excessive increases in brush length may lead to entanglement, which negatively impacts the chemical modulation efficiency. Full article