Search Results (41)

To meet the requirements of quantitative elemental analysis in the ultraviolet (UV) spectrum, a UV single-photon imaging system was developed, integrating a digital micromirror device (DMD) and a single photon-counting imaging detector, enabling high sensitivity, high resolution, and a wide dynamic range. However, intrinsic geometric distortion poses a significant challenge to accurate spectral calibration. A hybrid correction framework is proposed, cascading polynomial coarse correction with multilayer perceptron (MLP) fine regression, improving calibration accuracy. The method utilizes a full-field dot-array mask projected by the DMD to acquire distortion-reference image pairs. The polynomial model rapidly captures the dominant high-order distortion, while a lightweight MLP performs non-parametric fine regression of residual displacements, achieving a mean error of 0.84 pixels. This approach reduces the root mean square (RMS) error to 1.01 pixels, outperforming traditional direct linear transformation (5.35 pixels) and pure polynomial models (1.33 pixels), while the nonlinearity index decreases from 0.35° to 0.05°. In addition, the method demonstrates stable performance across multi-scale checkerboard patterns ranging from 128 to 280 pixels, with RMS errors remaining around the 1-pixel level. These results validate the high-precision distortion suppression and robust cross-scale performance of the proposed framework. By leveraging DMD-generated patterns for self-calibration, this method eliminates the need for external targets, offering a scalable solution for high-end spectrometer calibration. Full article

The echelle spectrometer utilizes an echelle grating as the primary dispersive element, combined with a prism or planar grating for cross-dispersion, to form a two-dimensional spectral image on an area-array Charge-Coupled Device (CCD). Compared with traditional spectrometers, this configuration provides superior spectral resolution, broader wavelength coverage, enhanced transient direct-reading capability, and higher energy throughput within a similar footprint. However, the use of area-array detectors significantly increases system cost, limiting adoption in cost-sensitive applications. To reduce cost while maintaining performance, we introduce a digital micromirror device (DMD) as a spatial light modulator to replace the traditional area-array detector, paired with a highly sensitive photomultiplier tube (PMT) for signal acquisition. The designed system operates across a wavelength range of 270 to 800 nm within a compact footprint of approximately 307 mm × 210 mm × 150 mm. The focused spot is accurately positioned on the DMD surface across the entire band, with the root mean square (RMS) spot radius smaller than a single micromirror’s size. Spectral information is efficiently coupled into the PMT via a focusing mirror by selectively flipping the DMD micromirrors for detection. Full article

A comprehensive review of the DMD-based optical lithography system has been conducted. The essence of the point-array with an oblique-scanning and stepping operation principle has been systematically analyzed, which will serve as the core driving force for its development and application. Similar to conventional lithography, the system development has been presented from the aspects of critical dimension (CD) resolution, overlay accuracy, and throughput. With the unique characterizations of the digital virtue mask, achievements are summarized from integrated circuit (IC) manufacturing to various micro-scale fabrication processes. Full article

Lidar has been extensively used in various applications, such as autonomous driving, robot navigation, and drone obstacle avoidance, due to its advantages of a high resolution, high-ranging accuracy, and strong anti-interference ability. The micro-electro-mechanical systems (MEMS) lidar technology approach has gained popularity due to its miniaturization and semi-solid state. However, the small scanning angle of the MEMS scanning micromirror and the associated radar system cause issues, such as a limited scanning range and low spatial resolution, which hinder the wider use of MEMS lidar. To address the problems caused by the small scanning angle of the MEMS micromirror and the limitations of the current optical system, this study suggests a new MEMS lidar transmitting optical system that offers a wide scanning angle and high spatial resolution. It is based on an array reflector group and a Fresnel lens, which enables the large-angle scanning of the target area while maintaining high spatial resolution. The scanning range is 120° × 60°, the spatial resolution is 0.05° × 0.25°, and the beam-filling ratio reaches 90.63%. Full article

Three-dimensional (3D) photolithography has found wide applications in microelectronics, optoelectronics, biomedicine, etc. Traditionally, it requires repetitive exposure and developing cycles. Meanwhile, a laser direct writing (LDW) system with a digital micromirror device (DMD) enables high-speed maskless lithography with programmable doses. In this paper, we propose a quasi-3D digitized photolithography via LDW with a DMD to remove multiple developing cycles from the process. This approach quantizes the dose of the 3D geometry and stores it in a grayscale image. And the entire dose distribution can be formed by overlapping the exposures with sliced binary dose maps from the above grayscale dose map. In the image slicing algorithm, a modified Golomb coding is introduced to make full use of the highest available exposure intensity. Both 1D multi-step patterns and diffractive optical devices (DOEs) have been fabricated to verify its feasibility. This type of digitized quasi-3D photolithography can be applied to fabricating DOEs, microlens arrays (MLAs), micro-refractive optical elements (μROEs), etc., and 3D molds for micro-embossing/nano-imprinting. Full article

A Micromirror Array Plate (MMAP) has been proposed as a type of aerial display that allows users to directly touch the floating image. However, the aerial images generated by this optical element have a limited viewing angle, making them difficult to use in face-to-face interactions. Conventional methods enable face-to-face usability by displaying multiple aerial images corresponding to different viewpoints. However, because these images are two-dimensional, they cannot be displayed at the same position due to the inherent characteristics of MMAP. An omnidirectional 3D autostereoscopic aerial display has been developed to address this issue, but it requires multiple expensive and specially shaped MMAPs to generate aerial images. To overcome this limitation, this study proposes a method that combines a single MMAP with integral photography (IP) to produce 3D aerial images with depth while reducing image misalignment. The experimental results demonstrate that the proposed method successfully displays a 3D aerial image using a single MMAP and reduces image misalignment to 1.1 mm. Full article

A micro-mirror array plate is a type of aerial image display that allows an observer to touch the aerial image directly. The problem with this optical element is that it produces stray light, called a ghost, which reduces the visibility of the aerial image. Conventional methods can suppress the occurrence of ghosts; however, depending on the observation position, uneven luminance is produced in aerial images. Therefore, in this study, we proposed a method for eliminating ghosts while suppressing the unevenness in the luminance of an aerial image using a prism. In the proposed device, a prism is placed between the liquid crystal display and the diffuser, which is the light source of the aerial display. The experimental results showed that the proposed method can suppress the unevenness in the luminance of aerial images better than the conventional ghost removal methods and can reduce the formation of ghosts better than the micromirror array plate alone. Therefore, the proposed method can be shown to be a ghost removal method that can suppress unevenness in the brightness of aerial images. Full article

An innovative glass substrate surface technology including integrated micro-electro-mechanical systems (MEMS) is presented as an advanced light modulation, heat control, and energy management system. This smart technology is based on millions of metallic micromirrors per square meter fabricated on the glass surface, which are arranged in arrays and electrostatically actuated. The smart window application exploits an elaborate MEMS glass technology for active daylight steering and energy management in buildings, enabling energy saving, CO₂ emission reduction, a positive health impact, and improved well-being. When light interacts with a glass substrate that has regular, repetitive patterning at the microscopic scale on its surface, these microstructures can cause the diffraction of the transmitted light, resulting in the potential deterioration of the view quality through the smart glass. A reduction in optical artifacts for improved clear view is presented by using irregular geometric micromirror apertures. Several non-periodic, irregular micromirror aperture designs are compared with corresponding periodic regular designs. For each considered aperture geometry, the irregular array reveals a reduction in optical artifacts and, therefore, by far a clearer view than the corresponding regular array. A systematic and comprehensive study was conducted through design, simulation, technological fabrication, experimental characterization, and analysis. Full article

This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive–voltage (C-V) measurement technique. In order to understand how geometric hinge parameters, initial opening angles, and materials affect the overall efficiency and functionality of the system, micromirror arrays have been analyzed using C-V measurements considering (i) full and broken hinge structures, (ii) 90° and 130° initial tilt angles (Φ), and (iii) different material layer combinations. The measurement results indicate that both an increase in the Young’s modulus of the applied materials and increasing the initial tilt angles increase the threshold voltages during the closing process of the micromirrors. Full article

This paper reviews and compares electrostatically actuated MEMS (micro-electro-mechanical system) arrays for light modulation and light steering in which transmission through the substrate is required. A comprehensive comparison of the technical achievements of micromirror arrays and microshutter arrays is provided. The main focus of this paper is MEMS micromirror arrays for smart glass in building windows and façades. This technology utilizes millions of miniaturized and actuatable micromirrors on transparent substrates, enabling use with transmissive substrates such as smart windows for personalized daylight steering, energy saving, and heat management in buildings. For the first time, subfield-addressable MEMS micromirror arrays with an area of nearly 1 m² are presented. The recent advancements in MEMS smart glass technology for daylight steering are discussed, focusing on aspects like the switching speed, scalability, transmission, lifetime study, and reliability of micromirror arrays. Finally, simulations demonstrating the potential yearly energy savings for investments in MEMS smart glazing are presented, including a comparison to traditional automated external blind systems in a model office room with definite user interactions throughout the year. Additionally, this platform technology with planarized MEMS elements can be used for laser safety goggles to shield pilots, tram, and bus drivers as well as security personal from laser threats, and is also presented in this paper. Full article

Millions of electrostatically actuatable micromirror arrays have been arranged in between windowpanes in inert gas environments, enabling active daylighting in buildings for illumination and climatization. MEMS smart windows can reduce energy consumption significantly. However, to allow personalized light steering for arbitrary user positions with high flexibility, two main limitations must be overcome: first, limited tuning angle spans by MEMS pull-in effects; and second, the lack of a second orthogonal tuning angle, which is highly required. Firstly, design improvements of electrostatically actuatable micromirror arrays are reported by utilizing tailored bottom electrode structures for enlarging the tilt angle (Φ). Considerably larger tuning ranges are presented, significantly improving daylight steering into buildings. Secondly, 2D actuation means free movement of micromirrors via two angles—tilt (Φ) and torsion angle (θ)—while applying two corresponding voltages between the metallic micromirrors and corresponding FTO (fluorine-doped tin oxide) counters bottom electrode pads. In addition, a solution for a notorious problem in MEMS actuation is presented. Micromirror design modifications are necessary to eliminate possible crack formation on metallic structure due to stress concentration during the free movement of 2D actuatable micromirror arrays. The concept, design of micromirror arrays and bottom electrodes, as well as technological fabrication and experimental results are presented and discussed. Full article

Earth observation (EO) is crucial for addressing environmental and societal challenges, but it struggles with revisit times and spatial resolution. The EU-funded SURPRISE project aims to improve EO capabilities by studying space instrumentation using compressive sensing (CS) implemented through spatial light modulators (SLMs) based on micromirror arrays (MMAs) to improve the ground sampling distance. In the SURPRISE project, we studied the development of an MMA that meets the requirements of a CS-based geostationary instrument working in the visible (VIS) and mid-infrared (MIR) spectral ranges. This paper describes the optical simulation procedure and the results obtained for analyzing the performance of such an MMA with the goal of identifying a mirror design that would allow the device to meet the optical requirements of this specific application. Full article

The conventional reflective optical surface with adjustable reflection characteristics requires a complex external power source. The complicated structure and preparation process of the power system leads to the limited modulation of the reflective properties and difficulty of use in large-scale applications. Inspired by the biological compound eye, different microstructures are utilized to modulate the optical performance. Convex aspheric micromirror arrays (MMAs) can increase the luminance gain while expanding the field of view, with a luminance gain wide angle > 90° and a field-of-view wide angle close to 180°, which has the reflective characteristics of a large gain wide angle and a large field-of-view wide angle. Concave aspheric micromirror arrays can increase the luminance gain by a relatively large amount of up to 2.66, which has the reflective characteristics of high gain. Industrial-level production and practical applications in the projection display segment were carried out. The results confirmed that convex MMAs are able to realize luminance gain over a wide spectrum and a wide range of angles, and concave MMAs are able to substantially enhance luminance gain, which may provide new opportunities in developing advanced reflective optical surfaces. Full article

In order to solve the problems of a low target recognition rate and poor real-time performance brought about by conventional infrared imaging spectral detection technology under complex background conditions or in the detection of targets of weak radiation or long distance, a kind of infrared polarization snapshot spectral imaging system (PSIFTIS) and a spectrum information processing method based on micro-optical devices are proposed in this paper, where the synchronous acquisition of polarization spectrum information is realized through the spatial modulation of phase with a rooftop-shaped multi-stage micro-mirror and the modulation of the polarization state of light with a micro-nanowire array. For the polarization interference image information obtained, the infrared polarization spectrum decoupling is realized by image segmentation, optical path difference matching, and image registration methods, the infrared polarization spectrum reconstruction is realized by Fourier transform spectral demodulation, and the infrared polarization image fusion is realized by decomposing and reconstructing the high- and low-frequency components of the polarization image based on the Haar wavelet transform. The maximum spectral peak wavenumber error of the four polarization channels of the polarization spectrum reconstruction is less than 2 cm⁻¹, and the polarization angle error is within 1°. Ultimately, compared with the unprocessed polarization image unit, the peak signal-to-noise ratio is improved by 45.67%, the average gradient is improved by 8.03%, and the information entropy is improved by 56.98%. Full article

This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology. Full article