Search Results (3)

As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optical systems due to its complex structure and large volume. The recent rapid development of MEMS varifocal optical elements has provided sufficient opportunities for miniaturized optical systems. Here, we review the literature on MEMS varifocal optical elements over the past two decades. Based on light control mechanisms, MEMS varifocal optical elements are divided into three categories: reflective varifocal mirrors, varifocal microlenses, and phased varifocal mirrors. A novel indicator is introduced to evaluate and compare the performance of MEMS varifocal optical elements. A wide range of applications is also discussed. This review can serve as a reference for relevant researchers and engineers. Full article

The aim of manufacturing can be described as achieving the predefined high quality product in a short delivery time and at a competitive cost. However, it is unfortunately quite challenging and often difficult to ensure that certain quality characteristics of the products are met following the contemporary manufacturing paradigm, such as surface roughness, surface texture, and topographical requirements. Ultraprecision machining (UPM) requirements are quite common and essential for products and components with optical finishing, including larger and highly accurate mirrors, infrared optics, laser devices, varifocal lenses, and other freeform optics that can satisfy the technical specifications of precision optical components and devices without further post-polishing. Ultraprecision machining can provide high precision, complex components and devices with a nanometric level of surface finishing. Nevertheless, the process requires an in-depth and comprehensive understanding of the machining system, such as diamond turning with various input parameters, tool features that are able to alter the machining efficiency, the machine working environment and conditions, and even workpiece and tooling materials. The non-linear and complex nature of the UPM process poses a major challenge for the prediction of surface generation and finishing. Recent advances in Industry 4.0 and machine learning are providing an effective means for the optimization of process parameters, particularly through in-process monitoring and prediction while avoiding the conventional trial-and-error approach. This paper attempts to provide a comprehensive and critical review on state-of-the-art in-surfaces monitoring and prediction in UPM processes, as well as a discussion and exploration on the future research in the field through Artificial Intelligence (AI) and digital solutions for harnessing the practical UPM issues in the process, particularly in real-time. In the paper, the implementation and application perspectives are also presented, particularly focusing on future industrial-scale applications with the aid of advanced in-process monitoring and prediction models, algorithms, and digital-enabling technologies. Full article

This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to monitor the focal length of the varifocal mirror. The device is made of a silicon-on-insulator (SOI) wafer and a glass wafer. A mirror plate and a counter electrode are fabricated by a top silicon layer of the SOI wafer and on the glass wafer, respectively. The piezoresistor is fabricated by ion implantation on a supporting beam of the mirror plate. The stress variation of the beam, which is detected by the piezoresistor, correspond the focal length of the varifocal mirror. The focus length varies from −41 to 35 mm at the resonant frequency of 9.5 kHz. The focal length of the varifocal mirror is monitored by the piezoresistor in real time. Full article