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Journal: Sensors, 2011
Volume: 11
Number: 9798

Article: Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques
Authors: by Ming-Zhi Yang, Ching-Liang Dai and Jin-Yu Hong
Link: https://www.mdpi.com/1424-8220/11/10/9798

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