Next Article in Journal
A Presence-Based Context-Aware Chronic Stress Recognition System
Previous Article in Journal
Development of Immunoassay Based on Monoclonal Antibody Reacted with the Neonicotinoid Insecticides Clothianidin and Dinotefuran
Previous Article in Special Issue
Estimation of PSD Shifts for High-Resolution Metrology of Thickness Micro-Changes with Possible Applications in Vessel Walls and Biological Membrane Characterization
Article Menu

Export Article

Open AccessArticle
Sensors 2012, 12(11), 15873-15887; doi:10.3390/s121115873

Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity

1
International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan
2
Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Neuchâtel CH-2002, Switzerland
*
Author to whom correspondence should be addressed.
Received: 10 September 2012 / Revised: 5 November 2012 / Accepted: 12 November 2012 / Published: 16 November 2012
(This article belongs to the Special Issue Transducer Systems)
View Full-Text   |   Download PDF [1154 KB, uploaded 21 June 2014]   |  

Abstract

We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor (MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensitivity by 3~4 times compared to the first generation MSS chip, resulting in a sensitivity about ~100 times better than a standard cantilever-type sensor and a few times better than optical read-out methods in terms of experimental signal-to-noise ratio. Since the integrated piezoresistive read-out of the MSS can meet practical requirements, such as compactness and not requiring bulky and expensive peripheral devices, the MSS is a promising transducer for nanomechanical sensing in the rapidly growing application fields in medicine, biology, security, and the environment. Specifically, its system compactness due to the integrated piezoresistive sensing makes the MSS concept attractive for the instruments used in mobile applications. In addition, the MSS can operate in opaque liquids, such as blood, where optical read-out techniques cannot be applied.
Keywords: Membrane-type Surface stress Sensor (MSS); nanomechanical sensors; piezoresistive; MEMS/NEMS Membrane-type Surface stress Sensor (MSS); nanomechanical sensors; piezoresistive; MEMS/NEMS
Figures

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Yoshikawa, G.; Akiyama, T.; Loizeau, F.; Shiba, K.; Gautsch, S.; Nakayama, T.; Vettiger, P.; Rooij, N.F.; Aono, M. Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity. Sensors 2012, 12, 15873-15887.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top