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Sensors 2013, 13(12), 16816-16828; doi:10.3390/s131216816

Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor

State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No.21, BeiSiHuan West Road, Beijing, China
Author to whom correspondence should be addressed.
Received: 2 September 2013 / Accepted: 14 November 2013 / Published: 5 December 2013
(This article belongs to the Special Issue Polymeric Micro Sensors and Actuators)
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This paper presents an optimal design for a new humidity sensor composed of a dual-resonator oscillator configuration with an operation frequency of 300 MHz, and a polyaniline (PANI) coating deposited along the resonation cavity of the sensing device. To improve the corrosion resistance of the sensor chip, Al/Au electrodes were used to form the SAW resonator. Prior to device fabrication, the coupling of modes (COM) model was used for the performance prediction and optimal design parameters determination. Two SAW resonators with Al/Au electrodes were fabricated on an ST-X quartz substrate, and used as the frequency control element in the feedback path of an oscillator circuit. A PANI thin coating was deposited onto the resonator cavity of the sensing device by a spinning approach as the sensor material for relative humidity (RH) detection. High detection sensitivity, quick response, good repeatability and stability were observed from the sensor experiments at room temperature. View Full-Text
Keywords: Al/Au electrodes; COM model; humidity sensor; oscillator; polyaniline; resonator Al/Au electrodes; COM model; humidity sensor; oscillator; polyaniline; resonator

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Wang, W.; Xie, X.; He, S. Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor. Sensors 2013, 13, 16816-16828.

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