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Sensors 2013, 13(3), 2719-2734; doi:10.3390/s130302719

A Harsh Environment Wireless Pressure Sensing Solution Utilizing High Temperature Electronics

College of Information Science and Engineering, Northeastern University, No. 11, Lane 3, Wenhua Road, Heping District, Shenyang 110819, Liaoning, China
Arkansas Power Electronics International, Inc., 535 W. Research Center Blvd., Fayetteville, AR 72701, USA 
Received: 21 January 2013 / Revised: 15 February 2013 / Accepted: 15 February 2013 / Published: 27 February 2013
(This article belongs to the Section Physical Sensors)
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Pressure measurement under harsh environments, especially at high temperatures, is of great interest to many industries. The applicability of current pressure sensing technologies in extreme environments is limited by the embedded electronics which cannot survive beyond 300 °C ambient temperature as of today. In this paper, a pressure signal processing and wireless transmission module based on the cutting-edge Silicon Carbide (SiC) devices is designed and developed, for a commercial piezoresistive MEMS pressure sensor from Kulite Semiconductor Products, Inc. Equipped with this advanced high-temperature SiC electronics, not only the sensor head, but the entire pressure sensor suite is capable of operating at 450 °C. The addition of wireless functionality also makes the pressure sensor more flexible in harsh environments by eliminating the costly and fragile cable connections. The proposed approach was verified through prototype fabrication and high temperature bench testing from room temperature up to 450 °C. This novel high-temperature pressure sensing technology can be applied in real-time health monitoring of many systems involving harsh environments, such as military and commercial turbine engines. View Full-Text
Keywords: pressure sensor; harsh environment; high temperature; wireless; silicon carbide pressure sensor; harsh environment; high temperature; wireless; silicon carbide

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Yang, J. A Harsh Environment Wireless Pressure Sensing Solution Utilizing High Temperature Electronics. Sensors 2013, 13, 2719-2734.

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