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Sensors 2013, 13(9), 12482-12496; doi:10.3390/s130912482

A Multi-Fork Z-Axis Quartz Micromachined Gyroscope

* ,
School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
* Author to whom correspondence should be addressed.
Received: 4 July 2013 / Revised: 19 August 2013 / Accepted: 11 September 2013 / Published: 17 September 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
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A novel multi-fork z-axis gyroscope is presented in this paper. Different from traditional quartz gyroscopes, the lateral electrodes of the sense beam can be arranged in simple patterns; as a result, the fabrication is simplified. High sensitivity is achieved by the multi-fork design. The working principles are introduced, while the finite element method (FEM) is used to simulate the modal and sensitivity. A quartz fork is fabricated, and a prototype is assembled. Impedance testing shows that the drive frequency and sense frequency are similar to the simulations, and the quality factor is approximately 10,000 in air. The scale factor is measured to be 18.134 mV/(°/s) and the nonlinearity is 0.40% in a full-scale input range of ±250 °/s.
Keywords: quartz micromachined gyroscope; multi-fork; coriolis force; anisotropic etching quartz micromachined gyroscope; multi-fork; coriolis force; anisotropic etching
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Feng, L.; Zhao, K.; Sun, Y.; Cui, J.; Cui, F.; Yang, A. A Multi-Fork Z-Axis Quartz Micromachined Gyroscope. Sensors 2013, 13, 12482-12496.

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