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Journal: Sensors, 2019
Volume: 19
Number: 1348

Article: Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator
Authors: by Jingjing Feng, Cheng Liu, Wei Zhang, Jianxin Han and Shuying Hao
Link: https://www.mdpi.com/1424-8220/19/6/1348

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