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Sensors 2007, 7(10), 2174-2182; doi:10.3390/s7102174

Magnetostrictive Micro Mirrors for an Optical Switch Matrix

Department of Mechanical Engineering, Inha University, Incheon 402-751, Korea
Author to whom correspondence should be addressed.
Received: 18 July 2007 / Accepted: 27 September 2007 / Published: 9 October 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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We have developed a wireless-controlled compact optical switch by siliconmicromachining techniques with DC magnetron sputtering. For the optical switchingoperation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm.TbDyFe film is sputter-deposited on the upper side of the mirror with the condition as: Argas pressure below 1.2×10-9 torr, DC input power of 180W and heating temperature of up to250°C for the wireless control of each component. Mirrors are actuated by externallyapplied magnetic fields for the micro application. Applied beam path can be changedaccording to the direction and the magnitude of applied magnetic field. Reflectivity changes,M-H curves and X-ray diffractions of sputtered mirrors are measured to determine magneto-optical, magneto-elastic properties with variation in sputtered film thickness. The deflectedangle-magnetic field characteristics of the fabricated mirror are measured.
Keywords: Optical switch; magnetostrictive mirror; TbDyFe; micromachining. Optical switch; magnetostrictive mirror; TbDyFe; micromachining.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Lee, H.-S.; Cho, C.; Cho, M.-W. Magnetostrictive Micro Mirrors for an Optical Switch Matrix. Sensors 2007, 7, 2174-2182.

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